Illumination optics

Abstract

Abstract Translated from Japanese (57)【要約】 【目的】従来よりも格段に照明効率が高く、より高いス ループット化にも十分に対応でき、しかもケーラー照明 が実現できる高性能な照明光学系の実現。 【構成】所定の大きさの光源像または所定の大きさの光 源を形成する光源手段と、該光源手段からの光束を集光 して被照明物体を照明する集光光学系とを有する照明光 学系において、前記集光光学系は、前記光源像または前 記光源からの光束を平行光束に変換して前記被照明物体 上を円弧状に照明する特殊反射鏡を有し、該特殊反射鏡 は、放物線の頂点から該放物線の対称軸に沿って所定の 距離だけ隔てた位置を該対称軸に対して垂直に通る基準 軸を中心に回転させた放物トーリック形状の回転体の１ 部より構成される。 (57) [Abstract] [Purpose] Achieves a high-performance illumination optical system that has significantly higher illumination efficiency than before and can sufficiently cope with higher throughput, and can also realize Koehler illumination. Illumination optics having a light source means for forming a light source image of a predetermined size or a light source of a predetermined size, and a condensing optical system for condensing a light flux from the light source means to illuminate an object to be illuminated. In the system, the condensing optical system has a special reflecting mirror for converting the light source image or the light flux from the light source into a parallel light flux to illuminate the illuminated object in an arc shape, and the special reflecting mirror includes: 1 of a parabolic toric rotor rotating about a reference axis passing perpendicularly to the symmetry axis at a position separated from the apex of the parabola by a predetermined distance along the symmetry axis of the parabola It is composed of parts.

Inventors

• 👤 Osamu Tanitsu
• 👤 修 谷津
• 👤 Koji Mori
• 👤 孝司 森
• 👤 Hideo Hirose
• 👤 秀男 広瀬

Bibliographic Details