Method for forming transparent conductive film

Abstract

Abstract Translated from Japanese (57)【要約】 【目的】複数の透明導電膜の間で透光性や導電性のバラ ツキがなく、均一な特性が得られた。 【構成】透明導電膜用の液状金属化合物を超音波振動が 印加されたノズルを介して霧状にし、その霧状金属化合 物を被着用基体の表面に吹き付けて金属化合物膜を形成 し、その後、該金属化合物膜を空気中あるいは酸素を含 む雰囲気中で２００〜６００℃で加熱し酸化させること により透明導電膜を形成することを特徴とする透明導電 膜の形成方法。 (57) [Summary] [Purpose] There was no variation in translucency or conductivity among a plurality of transparent conductive films, and uniform characteristics were obtained. [Structure] A liquid metal compound for a transparent conductive film is atomized through a nozzle to which ultrasonic vibration is applied, and the atomized metal compound is sprayed onto the surface of a substrate to be coated to form a metal compound film. A method for forming a transparent conductive film, which comprises forming the transparent conductive film by heating the metal compound film in air or in an atmosphere containing oxygen at 200 to 600 ° C. to oxidize it.

Inventors

• 👤 Hiroyuki Okushiba
• 👤 浩之 奥芝
• 👤 Minoru Tsukada
• 👤 稔 塚田
• 👤 Hiromitsu Tajiri
• 👤 寛充 田尻

Bibliographic Details