Manufacture of thin film magnetic head and manufacture device thereof

Abstract

Abstract PURPOSE:To decide the polishing state of a thin film magnetic head element at real time by providing a resistance sensor that a resistance value varies according to polishing quantity on a head block where plural thin film magnetic head elements are provided. CONSTITUTION:Plural resistance sensors 3 that the resistance values vary according to the polishing quantity are provided along the arrangement direction of thin film magnetic head elements 2. The load applied on a head block 1 is controlled in accordance with the distribution of the resistance values of these resistance sensors 3. Consequently, the polishing state of each for thin film magnetic head elements 2 is grasped at real time based on the resistance value of the resistance sensor 3 without suspending the polishing.

Inventors

• 👤 Takayuki Kasai
• 👤 葛西　隆之
• 👤 Makoto Hasegawa
• 👤 真 長谷川

Bibliographic Details