Automatic inspecting apparatus for force sensor

Abstract

Abstract PURPOSE:To make it possible to inspect the load and the output of each shaft by one attachment by providing a holding device for holding a sensor and changing its attitude and a device for imparting the load directed upward in the sensor through a contact member. CONSTITUTION:This apparatus inspects a diffusing type force sensor 10 wherein a silicon single crystal plate forming a diffusion gage is bonded on a strain generating body. The sensor 10 is formed of a holding part 52 which is turned by a second driving part 53 and a third driving part 54. The sensor 10 is supported with a supporting device 5 which converts an attitude. A spherical part 562 at the tip of a contact member 56 which is attached to the tip of a detecting arm 13 is engaged with a step 434 of a load applying part 43 of a load applying device 4 having a first driving part 421 at a driving device 42. A load directed upward is applied. The output of the sensor 10 can be inspected without the temperature of an environment and the artificial effect in the load change by the measurement with the automatically controllable devices. Since the moment and the load can be changed without changing jigs, the accurate detected data are obtained.

Inventors

• 👤 Yasushi Kajiwara
• 👤 靖 梶原

Bibliographic Details