JPH04233221A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Substrate support device and substrate rear side protection device
Assignee: Novellus Systems Inc
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Filing: 1991-07-16
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Granted: —
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Expires: 2011-07-16
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 De Ven Everhardus P Van
- 👤 エバーハーダス・ピー・バンデ・バン
- 👤 Eliot K Broadbent
- 👤 エリオット・ケイ・ブロードベント
- 👤 Jeffrey C Benzing
- 👤 ジェフリー・シー・ベンジング
- 👤 Barry L Chin
- 👤 バリー・エル・チン
- 👤 Christopher W Burkhart
- 👤 クリストファー・ダブリュ・バークハート
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-09 03:55
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45519; C23C16/45521; C23C16/04; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4585; C23C16/4586; C23C16/54; H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0431; H10P72/0434; H10P72/70; H10P72/76; H10P72/7604; H10P72/7612; H10P72/7618; H10P72/7621; H10P72/78
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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