Apparatus for hold-transferring wafer

Abstract

Abstract PURPOSE:To make it possible that a single-wafer method, by which wafers are transferred one by one, and a batch method, by which a group of wafers are transferred at a time, exhibit their respective advantages enough, by making at least one sheet of plates capable of advancing and retreating, and by performing a pitch adjustment. CONSTITUTION:When transferring wafers at a time by plates 38, 39, 40, 41, 42, for holding wafers, the plates 38, 39, 40, 41, 42 are made to be placed at the positions shown by solid lines. Then, when transferring the wafers of five sheets or less one by one, an advance/retreat motor 54 is driven, and parallel oscillating links 45, 46 are oscillated clockwise via a driving pulley 55, etc. Thereby, floating parallel links 47, 48 is rotated counter clockwise while falling downward, and a plate holder 33 is sent out, and further, the motor 54 is stopped at the position at which a sensor 57 senses the stroke ends of the links 47, 48. Thus, only the plate 38 of the lowest stage is brought into the state capable of transferring wafers, and is placed at the position shown by two-dot chain lines, and further, can transfer the wafers one by one. Also, when the pitches among the wafers are different from each other, the pitches of the plates 38, 39, 40, 41, 42 are adjusted.

Inventors

• 👤 Riichi Kano
• 👤 狩野　利一

Bibliographic Details