Manufacture of laminated ceramic substrate

Abstract

Abstract PURPOSE:To produce a ceramic substrate with improved yield by heating and compressing green sheets in a solvent atmosphere so that the green sheets can be laminated maintaining adhesiveness to prevent separation during sintering. CONSTITUTION:A container 41 is hermetically closed by a lid 44 which is attached to a bellows 43 of the container. The container 41 includes pressure dig 30 inside and contains solvent 6 such as trichloroethane in the bottom. A laminating dig thus configured is placed between upper and lower heating plates 23 and 24. The solvent 6 in the container is heated with the rise in temperature of the heating plates 23 and 24. When it is near the temperature ready for a compression step, the vapor pressure becomes high enough to suppress the vaporization of the solvent from the green sheers 10. Therefore, the laminated body is compressed with its green sheets 10 keeping adhesiveness, thereby preventing separation of green sheets during sintering.

Inventors

• 👤 Yoshihisa Kobayashi
• 👤 芳久 小林

Bibliographic Details