System for continuously processing semiconductor substrates

Abstract

Abstract PURPOSE:To enable operation of a system at the time of failure and maintenance by a method wherein each process working unit is coupled to a carrier mechanism via an interface while a stocker, a carry controller and a system controller for communicating and controlling between them are provided. CONSTITUTION:An interface 6 having a wafer identifying unit 13 for identifying a semiconductor substrate manages the substrate transferred from a carrying mechanism 4 to a process working unit 5, while a stocker 7 having a wafer identifying unit 16 for identifying the substrate manages the substrate transferred from the carrying mechanism 4 to a wafer storage 15. A carry controller 9 carries the substrate by an instruction from a system controller 10, which controls and communicates with the process working unit 5, the interface 6, the stocker 7 and the carrier controller 9 to manage the transfer of substrates and proceeding of process. A buffer unit 12 of the interface 6 temporarily houses the substrates while a transfer mechanism 11 transfers the substrates to the process working unit 5 by the instruction of the system controller 10.

Inventors

• 👤 Tadashi Kirisako
• 👤 桐迫　正
• 👤 Hiromichi Tani
• 👤 谷　博道
• 👤 Noriko Soma
• 👤 相馬　紀子
• 👤 Nobuhisa Shigemi
• 👤 重見　修久
• 👤 Takayuki Toyoda
• 👤 隆之 豊田

Bibliographic Details