Sample holder

Abstract

Abstract PURPOSE:To form a uniform electrified layer in the upper face of a sample and form a uniform film or perform uniform etching by separating an electrode layer into upper and lower layers with an insulating layer and applying DC voltage and high frequency to the upper and lower electrode layers respectively. CONSTITUTION:A sample mount 13 comprises upper and lower electrode layers 31 and 32 and an insulating layer 33 therebetween which are buried in an insulator 15 of ceramic or other materials and a high frequency application electrode rod 38 boring a cooling plate 11 is connected to the lower electrode layer 32. In adsorbing a sample 14, when a direct current is passed through a circuit the upper electrode layers 31a and 31b and the sample 14 are electrified to generate electrostatic power and the sample 14 is adsorbed to the sample mount 13. When high frequency is applied from an RF power source 38 to the lower electrode layer 32 and plasma is applied to form a film or perform etching, the upper face of the sample 14 is electrified negatively. Reactive gas ions are attracted to the electrified layer formed in the upper face of the sample 14 and a film is formed on the upper face of the sample 14 or the upper face of the sample 14 is etched.

Inventors

• 👤 Osamu Morita
• 👤 治 森田

Bibliographic Details