JPH033250A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Substrate holder
Assignee: Ulvac Inc
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Filing: 1989-05-30
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Granted: —
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Expires: 2009-05-30
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Masabumi Tanabe
- 👤 田辺 正文
- 👤 Soichi Komiya
- 👤 宗一 小宮
- 👤 Toshio Hayashi
- 👤 俊雄 林
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-05 20:18
CPC Classifications
—
Claims Analysis
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References Cited (Backward Citations)
JPS57148356A
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JPS58116232U
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JPS6294953A
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JPS6396912A
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JPS63140085A
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JPS62264638A
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