Piezoelectric acceleration sensor

Abstract

Abstract PURPOSE:To prevent noise from occurring due to a pyroelectric effect, etc. by providing a compensating piezoelectric body made of the same material and having the same thickness and the same electrode area as a film piezoelectric body for detecting acceleration in the vicinity of a detector. CONSTITUTION:A film piezoelectric body 13 and a load 14 are laminated on a seat 11 to constitute a sensor A. The load 14 functions as an intertial mass part and, with acceleration applied, generates strain on the film piezoelectric body 13. A compensating piezoelectric body 15 made of a film piezoelectric body having the same thickness and approximately the same electrode area as the film piezoelectric body 13 is adhered to a side of the film piezoelectric body 13 of the sensor A on the upper face of the seat 11, while electrodes of both piezoelectric bodies 13, 15 are wired to eliminate difference in potentials and electric charge generated between the upper and lower electrodes of both piezoelectric bodies. Thus an influence of a pyroelectric effect and common mode noise can be reduced.

Inventors

• 👤 Takayuki Imai
• 👤 隆之 今井
• 👤 Shiro Nakayama
• 👤 中山　四郎
• 👤 Satoshi Kunimura
• 👤 國村　智
• 👤 Katsuhiko Takahashi
• 👤 克彦 高橋

Bibliographic Details