Humidity sensing element
Abstract
Abstract PURPOSE:To facilitate expansion and contraction and to convert humidity into an electric signal sensitively by adhering a humidity-sensing expanding/contracting film on the surface of a strain gauge and orienting the film in the direction where the strain gauge increases in sensitivity. CONSTITUTION:A resistance body 1 which has lead wires 4 connected to both end terminals on a substrate 2 made of an expanding/ contracting material such as polyimide is wired as specified to form the strain gauge. The humidity-sensing expanding/ contracting film 3 is arranged on the surface of the strain gauge in the direction wherein its sensitivity becomes maximum, and the film is adhered to form the humidity sensing element 5. Therefore, the film expands or contracts with the humidity of an atmosphere to be measured and its expanding/contracting force operates on the strain gauge to vary atom intervals of the resistance body 1 and vary electric properties, thereby converting the humidity into the electric signal. Then the expansion/ contraction rate is largest in the orientation direction and the film 3 which is oriented in the direction of the large degree of freedom of expansion and contraction, therefore, expands or contracts sensitively according to the humidity of the atmosphere to be measured, so that its expanding/contracting force is transmitted to the strain gauge efficiently.
Inventors
- 👤 Kazuo Takahashi
- 👤 一夫 高橋
- 👤 Takashi Suzai
- 👤 須齋 嵩
Bibliographic Details
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