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JPH03211554A Expired / Lapsed JP ⏱️ 0.0 years remaining

Production of phase shift mask

Assignee: Fujitsu Ltd
•
Filing: 1990-01-17
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Granted: —
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Expires: 2010-01-17
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Abstract

Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Inventors

  • 👤 Jinko Kudo
  • 👤 工藤 仁子
  • 👤 Yasutaka Ban
  • 👤 伴 保隆
  • 👤 Kenji Sugishima
  • 👤 賢次 杉島
  • 👤 Kazuo Tokitomo
  • 👤 時友 一雄

Bibliographic Details

Application Number —
Jurisdiction JP
Data Source google_patents
Last Synchronized 2026-10-31 10:24
CPC Classifications
—

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