piezoelectric pressure sensor

Abstract

Abstract PURPOSE:To accurately measure the inside pressure of a cylinder by providing a part with the thinner surface thickness easily to be displaced by the pressure on a pressure receiving surface of a sensor. CONSTITUTION:The thickness of a center part in the pressure receiving surface 1a of a chassis 1 is thinner as compared with those of the circumferential parts, and this part is a part 1b easier to be displaced with the received pressure than the circumferential part, and only the pressure impressing to the part 1b is transmitted to a piezoelectric element 3 through a pressure transmission component 2. Further, an element fixing component 4 is brought into contact with the outer peripheral part on an upper face of the element 3 and mounted on an enclosure 1 by pinching a metal plate 7 and a printed-circuit board 5 consisting of an electric circuit 6 and tightening and fixing it by a fixing component 8. The direct heating from the enclosure 1 is avoided by the substrate 5 and the insulation against the electrode of a member 4 on the inner/outer peripheral face and insulation against the chassis 1 are attained. An electric charge is generated in accordance with a shearing stress in the element 3 and taken out through a spring component 9 in contact with the inside periphery of the element 3 and the component 4 in contact with the outer periphery then can be taken out by a cable 10 as the output signal proportional to the pressure through the circuit 6.

Inventors

• 👤 Masayuki Wakamiya
• 👤 若宮　正行
• 👤 Tetsuji Fukada
• 👤 深田　哲司

Bibliographic Details