JPH026334A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Production of lead titanate zirconate thin film
Assignee: Murata Manufacturing Co Ltd
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Filing: 1988-06-22
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Granted: —
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Expires: 2008-06-22
Abstract
Abstract PURPOSE:To produce a PZT thin film in high efficiency at a low cost, preventing the deviation of the compositional ratio, by coating a substrate with a solution of amine-modified multiple alkoxide sol of Ti, Zr and Pb and calcining the coating layer. CONSTITUTION:Acetates, oxyacetates or alkoxides or Ti, Zr and Pb are made to react with an amino alcohol to obtain an amine-modified multiple alkoxide sol solution. The sol solution is applied to a substrate by dipping, spin-coating, etc., and calcined to obtain a lead titanate zirconate thin film composed of fine particles having diameter of <=0.1mum.
Inventors
- 👤 Mitsuyoshi Okabe
- 👤 岡部 参省
- 👤 Hiroshi Tamura
- 👤 博 田村
- 👤 Yukio Sakabe
- 👤 行雄 坂部
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-01 12:27
CPC Classifications
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