Image sensor

Abstract

Abstract PURPOSE:To restrain crosstalk current flowing between picture elements of a photoelectric conversion element by making the metal pattern for leading out individual electrodes cover gaps between the individual electrodes and common electrodes, from the rear and for each of the individual electrodes. CONSTITUTION:On one side of a photoconducting layer 12, a plurality of individual electrodes 13 are installed, and on the other side, a suitable number of common electrodes 14 facing a specified number of the individual electrodes 13, 13... are arranged in the form a complementary comb teeth. At the same time of forming the electrodes 13, 14, a specified number of lower layer wirings 15 for an independent matrix wiring are formed along the common electrodes 14. After that, a zigzag gap between the individual electrodes 13 and the common electrodes 14 is protected with insulator, and an insulating film 16 is formed. Said film insulates the interlayer between an upper layer wiring 18 and the lower wiring 15 for the matrix wiring which is formed in the later process. A contact hole 17 is formed in the insulating film 16. Finally, a metal film is formed, and, by patterning each of the individual electrodes 13, a conducting pattern 19 serving concurrently as a connecting wire connected with the upper layer wiring 18 is formed.

Inventors

• 👤 Shigeru Noguchi
• 👤 能口　繁
• 👤 Kaneo Watanabe
• 👤 渡邉　金雄
• 👤 Hiroyuki Kuriyama
• 👤 博之 栗山
• 👤 Keiichi Sano
• 👤 佐野　景一
• 👤 Hiroshi Iwata
• 👤 岩多　浩志

Bibliographic Details