Impedance matching circuit

Abstract

Abstract PURPOSE:To optimize the matching of impedance by adjusting the capacity of a variable capacity element connected to one end of a stub. CONSTITUTION:One end of the stub 3 constituted of a stripped line is connected to transmission lines 1, 2 and the variable capacity element 5 is connected to the other end of the stub 3. An electrode 6 consisting of a metal is formed on the upper surface of a dielectric substance 7 such as SiNx formed so as to cover the upper surface of one end part of the stub 3 to form variable capacity element 5 consisting of the conductor of the stub 3, the dielectric substance 7 and the electrode 6 and having parallel plane capacity. When the area cf the electrode 6 is changed by trimming the trimming position 8 of the upper electrode 6 of the element 5 by electron beams or the like, the capacity Cx of the element 5 is changed. Thus, the output impedance of an impedance matching circuit can be always optimumly matched with the input impedance of a load.

Inventors

• 👤 Takao Hasegawa
• 👤 隆生 長谷川

Bibliographic Details