Process for treating photosensitive body

Abstract

Abstract PURPOSE:To maintain characteristics of a photosensitive body at good condition for a long time by treating an amorphous carbon film formed by plasma polymn. with a material capable of forming carbene. CONSTITUTION:A stage for treating an amorphous carbon film 3 with a material capable of forming carbene is included in a process for prepg. a photosensitive body having an amorphous carbon film formed by the plasma polymn. process. The amorphous carbon film 3 is formed by, for example, decomposing gaseous molecules with electric discharge under reduced pressure, diffusing activated neutral species or charged species contained in generated plasma atmosphere on a substrate 1, guiding them by the electric force or magnetic force, etc., and depositing the species in the form of a solid phase by a recombination reaction on the substrate 1. Suitable material to be used as material for forming carbene is a ketene compd. expressed by the formula I or a diazo compd. expressed by the formula II. In the formula I and II, each X1 and X2 is H or halogen atom. Thus, initial characteristics of a photosensitive body are maintained for a long time and changes of the characteristics with the lapse of time are reduced.

Inventors

• 👤 Hideo Yasutomi
• 👤 英雄 保富
• 👤 Shuji Iino
• 👤 修司 飯野
• 👤 Kenji Masaki
• 👤 賢治 正木
• 👤 Isao Doi
• 👤 勲 土井
• 👤 Mochikiyo Osawa
• 👤 大澤　以清
• 👤 Masanori Fujiwara
• 👤 正典 藤原

Bibliographic Details