Liquid crystal display substrate and its manufacture
Abstract
Abstract PURPOSE:To prepare a liquid crystal display substrate causing scarcely short-circuitting between wirings and facilitating orientation of the liquid crystals by providing a thin film transistor for the driving of picture element onto one of insulating film surfaces and providing a light shielding film to a position confronting a thin film transistor for the driving of picture element on another surface of the insulating film. CONSTITUTION:A thin film transistor 102 for the driving of a picture element is provided onto an insulating film 101 on a silicon substrate 100, and a silicon substrate 104 interposing a bonding layer 103 above the silicon substrate 100. Then, a rear side of the silicon substrate is ground and the insulating film 101 is bared. Thereafter, a light shielding film 105 is provided on the insulating film 101, and a substrate 107 consisting of a transparent insulating material is bonded thereto interposing a bonding layer 106. The silicon substrate 104 is removed by grinding and a liquid crystal display substrate constituted of a thin film transistor on a transparent substrate is obtd. The insulating film 101 can be formed at high temp. is obtd. because it is prepd. prior to the formation of the thin film transistor 102 for the driving of a picture element. Thus, a liquid crystal display substrate having high reliability because of scarce presence of pinholes in the insulating film 101, causing scarce short circuit between the light shielding film and wiring.
Inventors
- 👤 Ken Sumiyoshi
- 👤 研 住吉
Bibliographic Details
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