Wafer prober

Abstract

Abstract PURPOSE:To provide a wafer prober capable of automatically performing registration of a probe card in the directions of X, Y, theta and Z which has been conducted manually by an operator according to prior arts, by providing it with a specific wafer chuck, a specific X-Y stage, a specific contact plate, a specific driving mechanism, a specific detecting means, a specific image pickup means and a specific control means. CONSTITUTION:A wafer prober of the invention comprises a wafer chuck 1, an X-Y stage 3, a contact plate 21 moved by the X-Y stage 3 together with the wafer chuck 1, a driving mechanism for moving the contact plate 21 in the direction Z with respect to the X-Y stage, a detecting means for detecting one or more positions of needle points of a group of probe needles 6 provided on a probe card 7, an image pickup means 20 for imaging one or more of the needle points of the group of probe needles 6 through a contact plate 21, and a control means for controlling the X-Y stage 3 and the driving mechanism based on a result of detection of the detecting means, pressing the contact plate 21 against one or more needle points of the group of probe needles 6 and controlling alignment between the group of probe needles 6 and a wafer based on an image signal from the image pickup means 20.

Inventors

• 👤 Teruya Sato
• 👤 光弥 佐藤
• 👤 Takao Ukaji
• 👤 隆夫 宇梶
• 👤 Atsuto Yamaguchi
• 👤 敦人 山口
• 👤 Taro Omori
• 👤 大森　太郎
• 👤 Eiichi Murakami
• 👤 栄一 村上

Bibliographic Details