Concentrated ozone generator

Abstract

Abstract PURPOSE:To prevent a decrease in the ozone concn. with time by incorporating a specified amt. of the high-purity gas other than high-purity oxygen into high- purity oxygen in the silent discharge-type concd. ozone generator using high- purity oxygen as the oxygen source. CONSTITUTION:A cylinder 1 as the high-purity oxygen source is connected to the silent discharge-type ozone generator 5 through a pressure reducing valve 2, a flowmeter 3, a flow control valve 4, etc. A cylinder 7 as the source for supplying the high-purity gas (e.g., N2 and Ar) other than high-purity oxygen is also connected through a pressure reducing valve 8, a flowmeter 9, a flow control valve 10, etc. The high-purity gas other than high-purity oxygen is mixed by 1-10vol.% into the high-purity oxygen, and the mixture is supplied to the ozone generator 5 to generate concd. ozone. A decrease in the ozone concn. with time can be prevented by this method, and the obtained concd. ozone can be appropriately used for the removal of a photoresist in the production of a semiconductor, etc.

Inventors

• 👤 Tetsusuke Yokomi
• 👤 横見　哲介
• 👤 Jiro Kobayashi
• 👤 次郎 小林
• 👤 Takeshi Nakatsuka
• 👤 豪 中塚

Bibliographic Details