Narrow band oscillation excimer laser

Abstract

Abstract PURPOSE:To realize an excimer laser oscillator of an exposure light source high in wavelength stability at a low cost by a method wherein an etalon and a diffraction grating, positioned in such a manner that light rays are obliquely incident on it, are arranged in a cavity. CONSTITUTION:An etalon 1 and a diffraction grating 2 disposed to make an incident angle THETA are arranged. In this device, many oscillation lines appear in a natural oscillation width of an excimer laser through the etalon 1, and a required oscillation line can be obtained by varying the incident angle THETAof the diffraction grating 2 corresponding to the space between these oscillation lines. Moreover, it is preferable that the space determining the FSR of the etalon 1 is within a range of 800-1300mum, and when the number of lines carved on the etalon 1 are set to be 1400-4000lines/mm, an excellent result can be obtained.

Inventors

• 👤 Koichi Kajiyama
• 👤 康一 梶山
• 👤 Kaoru Saito
• 👤 斎藤　馨
• 👤 Norio Moro
• 👤 茂呂　則夫

Bibliographic Details