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JPH01181518A Expired / Lapsed JP ⏱️ 0.0 years remaining

Helium chamber for x ray exposure device

Assignee: NEC Corp
•
Filing: 1988-01-12
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Granted: —
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Expires: 2008-01-12
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Abstract

Abstract PURPOSE:To enable a high helium concentration to be retained by providing an oxygen monitor for measuring oxygen concentration within an airtight chamber, and a tank for keeping helium gas which is discharged from an airtight chamber. CONSTITUTION:An oxygen monitor 9 for measuring oxygen concentration within a sealed chamber 5 and a tank 11 with an introduction port which is airtightly connected to the discharge port of an airtight chamber 5 and a discharge port which releases internal gas into air are provided. Then, the oxygen monitor 9 is used to measure oxygen concentration within the airtight room 5 and exposure is performed after confirming that oxygen concentration is fully low. Helium gas discharged from the airtight chamber 5 stays within a tank 11 and helium gas flows into the airtight chamber 5 from the tank 11 even if the airtight chamber 5 is in negative pressure status. It prevents air from flowing into the airtight chamber 5 in reverse direction even if the pressure within the airtight chamber 5 drops due to gas suction by the a pump of the oxygen monitor 9.

Inventors

  • 👤 Ryoji Tanaka
  • 👤 良治 田中
  • 👤 Hidekazu Kono
  • 👤 英一 河野
  • 👤 Joji Iwata
  • 👤 岩田 穣治

Bibliographic Details

Application Number —
Jurisdiction JP
Data Source google_patents
Last Synchronized 2026-11-09 02:22
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/708; G03F7/70858; G03F7/70866

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