Azeotropic solvent composition

Abstract

Abstract PURPOSE:To improve the wax detergency of chlorofluorocarbon-113 and, at the same time, to lower the amt. of use thereof, by mixing 1,1,2-triochloro-1,2,2- trifluoroethane with dimethoxymethane in a particular proportion. CONSTITUTION:This azeotropic solvent compsn. comprises 42wt.% 1,1,2- triochloro-1,2,2-trifluoroethane (chlorofluorocarbon-113) and 58wt.% dimethoxymethane. Although this compsn. is relatively chemically stable, it is possible to further add a stabilizer. It is pref. that the stabilizer be removed or form an azeotropic compsn. in the course of distillation. Examples of the stabilizer include nitromethane and 3-methyl-1-butyne. The azeotropic solvent compsn. is useful as a detergent for removing fat or grease, removing wax used in temporary fixation for working such as cutting or polishing of silicon wafer, quartz, ceramics or the like used for semiconductors, and removing a release agent of a photoresist.

Inventors

• 👤 Koji Tamura
• 👤 公司 田村
• 👤 Yukio Omure
• 👤 大牟礼　幸雄
• 👤 Satoru Ide
• 👤 井手　哲
• 👤 Naomi Hanatani
• 👤 花谷　尚美
• 👤 Hisamasa Fukuzawa
• 👤 福澤　寿正

Bibliographic Details