JP2002107913A
Expired / Lapsed
JP
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Defect repair method of gray tone part in gray tone mask
Assignee: Hoya Corp
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Filing: 2000-09-29
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Granted: —
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Expires: 2020-09-29
Abstract
Abstract PROBLEM TO BE SOLVED: To provide a correction method to easily correct defects in a gray tone part which are substantially difficult to be corrected by a conventional correction method. SOLUTION: For example, after a correction film 8 is formed in the region including a white defect, the correction film 8 is partially removed according to the form and/or arrangement which produces the gray tone effect equivalent to the normal pattern to form a correction pattern 3a', 3b' having mutually different widths and position from the normal pattern 3a, 3b.
Inventors
- 👤 Kenji Nakayama
- 👤 憲治 中山
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-08 17:03
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/36; G03F1/26; G03F1/32; G03F1/54; G03F1/68; G03F1/72; G03F1/82; G03F1/84; G03F7/00; G03F7/70; G03F7/70691; G03F7/70791
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