GB2139358A
Expired / Lapsed
GB
⏱️ 0.0 years remaining
Piezo-resistive rotation transducer
Assignee: STC PLC
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Filing: 1983-05-05
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Granted: —
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Expires: 2003-05-05
Abstract
Abstract A transducer responsive to rotational movement comprises a support member (11) on which a shaft (13) is rotatably mounted. Relative movement between the member (11) and the shaft (13) is sensed by flexure of a strip (15) of a single-crystal piezo-resistive material, e.g. silicon. The strip (15) can be connected in a Wheatstone bridge circuit supplying an amplifier. By masking and etching a silicon wafer to include the bridge resistors and amplifier, a plurality of strips can be manufactured. Stops (18) limit flexure of strip (15). <IMAGE>
Inventors
- 👤 John Christopher Greenwood
Bibliographic Details
Application Number
—
Jurisdiction
GB
Data Source
google_patents
Last Synchronized
2026-11-10 02:13
CPC Classifications
G; G01; G01D; G01D5/00; G01D5/12; G01D5/14; G01D5/18; G01D5/183; G01D5/185
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
39 words
A transducer for detecting relative rotational movement between first and second bodies, wherein the sensor element of the transducer comprises a flexible strip of a single crystal piezo-resistive material so disposed as to be flexed by the rotational movement.
Claim 2
Dependent Claim
39 words
A transducer for detecting relative rotational movement between first and second bodies, wherein the sensor element of the transducer comprises a flexible strip of a single crystal piezo-resistive material so disposed as to be flexed by the rotational movement.
Claim 3
Dependent Claim
60 words
A transducer responsive to rotational movement, including a support member having a shaft rotatably mounted thereon, and a flexible transducer element formed from a single crystal piezo-resistive material, wherein the transducer element is coupled between the shaft and the support member such that relative rotational motion therebetween causes flexure of the element and a corresponding change in its electrical sensitivity.
Claim 4
Dependent Claim
60 words
A transducer responsive to rotational movement, including a support member having a shaft rotatably mounted thereon, and a flexible transducer element formed from a single crystal piezo-resistive material, wherein the transducer element is coupled between the shaft and the support member such that relative rotational motion therebetween causes flexure of the element and a corresponding change in its electrical sensitivity.
Claim 5
Dependent Claim
18 words
A transducer as claimed in claim 2, wherein said element is provided with a
Wheatstone bridge resistor network.
Claim 6
Dependent Claim
21 words
A transducer as claimed in claim 3, wherein said element includes an amplifier for amplifying the output of said bridge network.
Claim 7
Dependent Claim
22 words
A transducer as claimed in any one of claims 1 to 4, wherein the element comprises a strip of single crystal silicon.
Claim 8
Dependent Claim
22 words
A transducer as claimed in claim 5, wherein the element is formed by masking and etching of a single crystal silicon wafer.
Claim 9
Dependent Claim
12 words
A transducer substantially as described herein with reference to the accompanying drawings.
Claim 10
Dependent Claim
12 words
A transducer substantially as described herein with reference to the accompanying drawings.
Claim 11
Dependent Claim
18 words
A telemetry or control system incorporating a transducer as claimed in any one of claims 1 to 7.
References Cited (Backward Citations)
GB1061945A
Cited
GB1585401A
Cited
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