METHOD FOR MANUFACTURING NON-CONDUCTIVE LAYERS WITH VARIATION IN ATOMIC COMPOSITION

Abstract

Abstract Translated from French PROCEDE DE FABRICATION DE COUCHES NON CONDUCTRICES A VARIATION DE COMPOSITION ATOMIQUE. LES COUCHES SONT FAITES DE COMPOSES NON CONDUCTEURS DONT LA FORMULE CHIMIQUE COMPORTE AU MOINS UNE COMPOSITION ATOMIQUE. LE PROCEDE CONSISTE A REALISER UN DEPOT PAR COEVAPORATION SOUS VIDE DES ELEMENTS ENTRANT DANS LA COMPOSITION DES COUCHES EN FAISANT VARIER DE FACON MONOTONE LA TEMPERATURE D'AU MOINS L'UN DES ELEMENTS DONT LA PROPORTION, DANS LES COMPOSES NON CONDUCTEURS, DEPEND DE LA COMPOSITION ATOMIQUE, DE FACON A OBTENIR DES COUCHES PRESENTANT, SUIVANT LEUR PROFONDEUR, UNE VARIATION MONOTONE DE LA COMPOSITION ATOMIQUE, LE DEPOT ETANT SUIVI D'UN RECUIT SOUS AIR REALISE IN SITU. APPLICATION A L'OPTOELECTRONIQUE. PROCESS FOR MANUFACTURING NON-CONDUCTIVE LAYERS WITH A VARIATION OF ATOMIC COMPOSITION. THE LAYERS ARE MADE OF NON-CONDUCTING COMPOUNDS WHOSE CHEMICAL FORMULA CONTAINS AT LEAST AN ATOMIC COMPOSITION. THE PROCESS CONSISTS OF PERFORMING A DEPOSIT BY VACUUM COEVAPORATION OF THE ELEMENTS ENTERING THE COMPOSITION OF THE LAYERS BY VARIING MONOTONLY THE TEMPERATURE OF AT LEAST ONE OF THE ELEMENTS WHOSE PROPORTION, IN THE NON-CONDUCTIVE COMPOUNDS, DEPENDS ON THE COMPOSITION ATOMIC, SO AS TO OBTAIN LAYERS PRESENTING, ACCORDING TO THEIR DEPTH, A MONOTONIC VARIATION OF THE ATOMIC COMPOSITION, THE DEPOSIT BEING FOLLOWED BY AN AIR ANNING CARRIED OUT IN SITU. APPLICATION TO OPTOELECTRONICS.

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