Probe dia. variation device for electron beam analysis - uses two beam deflectors and has fixed multi-aperture plate

Abstract

Abstract The appts. works in conjunction with an X-ray analyser using the bombardment of electrons on a sample, and is connected to an electronic probe in order to vary the aperture of the electronic beam, for example to change from functioning as a scanning electron microscope to functioning as an X-ray microprobe. The device contains an electronic beam source, set of lenses and plate with holes to vary the electronic beam aperture. In this device however the plate is fixed in relation to the optical axis of the system. The device contains two beam deflectors, the first before the plate to permit the beam to pass through one hole of the plate and the second after the plate to return the beam to the optical axis of the system.

Inventors

• 👤 Kirill Alexandrovich Makarov
• 👤 Oleg Petrovich Bratov
• 👤 Lidia Fedorovna Vyal
• 👤 Vladimir Ivanovich Morozov

Bibliographic Details