FR1524841A
Expired / Lapsed
FR
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Process for the preparation of chemically attackable silicon nitride in the form of thin films
Assignee: Siemens AG
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Filing: 1967-05-30
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Granted: 1968-05-10
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Expires: 1987-05-30
Abstract
No abstract record available.
Inventors
No inventors recorded.
Bibliographic Details
Application Number
—
Jurisdiction
FR
Data Source
google_patents
Last Synchronized
2026-11-04 17:13
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/694; H10P14/6943; H10P14/69433; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/34; C23C16/345; H10D; H10D99/00; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/66; H10P14/668; H10P14/6681; H10P14/6682; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283
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