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Semiconductor Device Manufacturing Improvements

Assignee: Siemens and Halske AG
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Filing: 1963-07-26
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Granted: 1964-06-19
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Expires: 1983-07-26
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Abstract

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Inventors

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Bibliographic Details

Application Number —
Jurisdiction FR
Data Source google_patents
Last Synchronized 2026-10-29 12:53
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C23; C23C; C23C16/00; H; H10; H10P; H10P14/00; H10P14/20; H10P14/24; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P14/3414; H10P14/3421; H10P14/3438; H10P14/3441; H10P95/00

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