Multiple contents container assembly for ultrapure solvent purging

Claim 2

The assembly of Claim 1 wherein the source chemical solvent ampoule and the solvent capture ampoule comprise a single baffled ampoule.

Claim 3

The assembly of Claim 1 wherein the source chemical solvent ampoule is inside said high purity source chemical container and said inlet to the interior of the source chemical solvent ampoule and said outlet from the interior of the source chemical solvent ampoule access an exterior of said high purity source chemical container.

Claim 4

The assembly of Claim 1 wherein the solvent capture ampoule is inside said high purity source chemical container and said orifice communicating with the interior of the solvent capture ampoule accesses an exterior of said high purity source chemical container.

Claim 5

The assembly of Claim 1 wherein said assembly has a chime ring bracket on an exterior of said high purity source chemical container.

Claim 6

The assembly of Claim 5 wherein said source chemical solvent ampoule is integral to said chime ring bracket.

Claim 7

The assembly of Claim 5 wherein said solvent capture ampoule is integral to said chime ring bracket.

Claim 8

The assembly of Claim 1 wherein said high purity source chemical container has a diptube connected to said outlet and extending to a point adjacent a bottom of said high purity source chemical container.

Claim 9

The assembly of Claim 1 wherein said high purity source chemical container has a level sensor communicating with an exterior of said container and extending to a point adjacent a bottom of said high purity source chemical container.

Claim 10

The assembly of Claim 9 wherein said level sensor is selected from the group consisting of a float level sensor, an ultrasonic level sensor, a capacitance level sensor, an optical level sensor and combinations thereof.

Claim 11

The assembly of Claim 1 wherein said inlet and said outlet of said high purity source chemical container each have a valve for controlling flow of pressurizing fluid or high purity source chemical, respectively.

Claim 12

The assembly of Claim 11 wherein said valve is selected from the group consisting of a pneumatic valve, a solenoid valve, a manual valve and combinations thereof.

Claim 13

The assembly of Claim 1 wherein said source chemical solvent ampoule has a diptube connected to said outlet of said source chemical solvent ampoule and extending to a point adjacent a bottom of said source chemical solvent ampoule.

Claim 14

The assembly of Claim 1 wherein said inlet to said high purity source chemical container is connected to a source of pressurizing inert gas.

Claim 15

The assembly of Claim 1 wherein said inlet to said source chemical solvent ampoule is connected to a source of pressurizing inert gas.

Claim 16

The assembly of Claim 1 wherein said source chemical solvent ampoule contains a solvent under pressure without connection to an external source of pressure.

Claim 17

The assembly of Claim 1 wherein said solvent capture ampoule has two orifices.

Claim 18

The assembly of Claim 17 wherein one of said orifices of said solvent capture ampoule is connected to one of a low pressure vent or source of vacuum.

Claim 19

The assembly of Claim 1 wherein the interior of said solvent capture ampoule is under vacuum without connection to a source of vacuum.

Claim 20

The assembly of Claim 1 wherein said assembly has a quantity of high purity source chemical contained in said high purity source chemical container selected from the group consisting of tantalum pentaethoxide (TAETO), tetrakis(diethylamino) titanium (TDEAT), tetrakis(dimethylamino) titanium (TDMAT), tetramethylcyclotetrasiloxane (TMCTS), copper hexafluoroacetylacetonate- trimethylvinylsilane (Cu(hfac)TMVS), tetraethylorthosilicate (TEOS), trimethy(borate (TMB), triethylborate (TEB), trimethylphosphite (TMPi), triethylphosphate (TEPO), bistertiarybutylaminosilane (BTBAS), tantalumtetraethoxidedimethylaminoethoxide (TAT-DMAE), t-butylimidotrisdiethylamido tantalum (TBTDET), triethyl arsenite (TEOA), polyarylene ethers and mixtures thereof.

Claim 21

The assembly of Claim 1 wherein said assembly has a quantity of source chemical solvent contained in said source chemical solvent ampoule selected from the group consisting of organic alcohols such as methanol, ethanol, propanol, butanol, acetone, tetrahydrofuran, dimethylsiloxane, water, aliphatic hydrocarbons such as hexane, heptane, octane, decane, and dodecane, aromatic hydrocarbons, ketones, aldehydes, hydrocarbons, ethers, esters, glymes, aromatic hydrocarbons, halogen containing alcohols, alkyl nitriles, alkanols, organic amines, fluorinated compounds, perfluorocarbons such as perfluorohexane and perfluoroheptane and mixtures thereof.

Claim 22

The assembly of Claim 1 wherein said solvent capture ampoule contains a sorbent for said solvent.

Claim 23

The assembly of Claim 1 wherein said solvent capture ampoule contains a sorbent for said solvent and said high purity source chemical.

Claim 24

The assembly of Claim 23 wherein said sorbent is selected from the group consisting of zeolites, aluminosiiicates, phosphosilicates, carbon, silica, alumina, molecular sieve, carbon molecular sieve, polymeric adsorbents, polyethylene, polypropylene, resin beds, clays, porous ceramics and mixtures thereof.

Claim 25

The assembly of Claim 23 wherein said sorbent renders said solvent and said high purity source chemical non-flammable and/or non-hazardous.

Claim 26

The assembly of Claim 25 wherein said sorbent is a perfluorocarbon.

Claim 27

The assembly of Claim 25 wherein said sorbent is a low volatility oil.

Claim 28

The assembly of Claim 1 wherein said high purity source chemical container has a baffle to define two chambers to contain two distinct high purity source chemicals wherein each chamber has at least one inlet to the interior of such chamber and at least one outlet from the interior of such chamber.

Claim 29

The assembly of Claim 28 wherein said high purity source chemical container chambers each have a level sensor communicating with an exterior of said chamber, respectively, and extending to a point adjacent a bottom of said chamber, respectively.

Claim 30

The assembly of Claim 1 wherein said source chemical solvent ampoule and said solvent capture ampoule each are affixed to said assembly by a fastening selected from the group consisting of welding, soldering, bolting, screwing, strapping, bracketing and combinations thereof.

Claim 31

The assembly of Claim 1 wherein said source chemical solvent ampoule and said solvent capture ampoule each are affixed to said assembly by an ampoule bracket integral to said assembly comprising two ampoule bracket sections which interface with one another to engage each ampoule.

Claim 32

The assembly of Claim 31 wherein the engagement is a friction fit of the two ampoule bracket sections with said ampoules.

Claim 33

A high purity source chemical container assembly, comprising; a high purity source chemical container, an inlet to the interior of the source chemical container having an integral pneumatic valve for connection to a source of pressurizing inert gas, an outlet from the interior of the source chemical container having an integral pneumatic valve for connection to a manifold to deliver high purity source chemical to a downstream process using said chemical said outlet having a diptube extending to a point adjacent a bottom of said source chemical container, at least one source chemical solvent ampoule integral to said assembly, an inlet to the interior of the source chemical solvent ampoule having an integral pneumatic valve for connection to a source of pressurizing inert gas, an outlet from the interior of the source chemical solvent ampoule having an integral pneumatic valve for connection to said manifold which delivers high purity source chemical to a downstream process, a solvent capture ampoule integral to said assembly sized to accommodate source chemical solvent from said source chemical solvent ampoule, and an orifice communicating with the interior of the solvent capture ampoule to receive source chemical solvent from said source chemical solvent ampoule through said manifold.

Claim 34

The assembly of Claim 33 wherein said source chemical solvent ampoule and said solvent capture ampoule each are affixed to said assembly by an ampoule bracket integral to said assembly comprising two ampoule bracket sections which interface with one another to engage each ampoule by a friction fit of the two ampoule bracket portions with said ampoules.

Claim 35

The assembly of Claim 33 wherein said source chemical solvent ampoule contains a solvent under pressure without connection to an external source of pressure.

Claim 36

The assembly of Claim 33 wherein the interior of said solvent capture ampoule is under vacuum without connection to a source of vacuum.

Claim 37

The assembly of Claim 33 wherein the source chemical solvent ampoule and the solvent capture ampoule comprise a single baffled ampoule.

Claim 38

The assembly of Claim 33 wherein the source chemical solvent ampoule is integral to the source chemical container by attachment selected from the group consisting of a chime ring bracket, the container, a bung, an ampoule bracket and combinations thereof.

Claim 39

The assembly of Claim 1 wherein the source chemical solvent ampoule is integral to the source chemical container by attachment to apparatus selected from the group consisting of a chime ring bracket, the container, a bung, an ampoule bracket and combinations thereof.

Claim 40

The assembly of Claim 1 wherein said solvent capture ampoule has at least two orifices comprising at least one inlet for solvent entry and at least on outlet to facilitate venting, each orifice having a valve for closing said orifices wherein said valve is selected from the group consisting of pneumatic, manual, electrical, hydraulic, solenoid and combinations thereof, a diptube that extends to near the bottom of the solvent capture ampoule and a level sense selected from the group consisting of floats, optical, capacitive, weight, thermal, or combinations thereof.

Claim 41

The assembly of Claim 1 wherein said source chemical solvent ampoule contains a solvent for the high purity source chemical that reacts with the high purity source chemical to create soluble byproducts.

Claim 42

A high purity source chemical container assembly, comprising; a high purity source chemical container, an inlet to the interior of the source chemical container having an integral pneumatic valve for connection to a source of pressurizing inert gas, an outlet from the interior of the source chemical container having an integral pneumatic valve for connection to a manifold to deliver high purity source chemical to a downstream process using said chemical said outlet having a diptube extending to a point adjacent a bottom of said source chemical container, at least one source chemical solvent ampoule integral to said assembly, an outlet from the interior of the source chemical solvent ampoule having an integral pneumatic valve for connection to said manifold which delivers high purity source chemical to a downstream process, a solvent capture ampoule integral to said assembly sized to accommodate source chemical solvent from said source chemical solvent ampoule, having an orifice communicating with the interior of the solvent capture ampoule to receive source chemical solvent from said source chemical solvent ampoule via said manifold.

Claim 43

A process for cleaning a manifold which delivers high purity source chemical from a high purity source chemical container assembly to a point of use wherein a high purity source chemical container having an inlet to the interior of the source chemical container having an integral pneumatic valve for connection to a source of pressurizing inert gas and an outlet from the interior of the source chemical container having an integral pneumatic valve for connection to said manifold to deliver high purity source chemical to a point of use wherein said outlet has a diptube extending to a point adjacent a bottom of said source chemical container, wherein after delivery of the source chemical to said manifold, the manifold is cleaned by delivering a source chemical solvent from a source chemical solvent ampoule integral to said assembly to said manifold by pressurizing said source chemical solvent ampoule through an inlet to the interior of the source chemical solvent ampoule having an integral pneumatic valve for connection to a source of pressurizing inert gas to deliver said source chemical solvent to an outlet from the interior of the source chemical solvent ampoule having an integral pneumatic valve for connection to said manifold and collecting said solvent and any source chemical carried by said solvent from said manifold in a solvent capture ampoule integral to said assembly sized to accommodate source chemical solvent from said source chemical solvent ampoule through an orifice communicating with the interior of the solvent capture ampoule to receive source chemical solvent from said source chemical solvent ampoule.

Claim 44

The process of Claim 43 wherein the opening and closing of valves and transfer of source chemical and source chemical solvent is controlled by an automated control unit communicating with such valves.