EP1129998A1
Expired / Lapsed
EP
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Method for producing quartz glass member and quartz glass member produced thereby
Assignee: Nikon Corp
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Filing: 2000-07-05
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Granted: —
•
Expires: 2020-07-05
Abstract
Abstract A silica glass member manufacturing method of the present invention includes the steps of making a silicon compound react in oxyhydrogen flame using a burner having a multi-tubular structure to obtain fine silica glass particles, depositing the fine silica glass particles on a support rotating and placed to oppose the burner to obtain a silica glass ingot with a temperature distribution in at least one plane perpendicular to a rotational axis of the silica glass ingot, the temperature distribution being symmetrical with respect to the rotational axis and having a maximal value between a center and a peripheral portion of the plane, and obtaining a distribution of signed birefringence values on the basis of birefringence values and directions of phase advance axes measured at a plurality of points in the plane perpendicular to the rotational axis of the silica glass ingot and cutting, from the silica glass ingot, a silica glass member whose signed birefringence values monotonously increase from the center to the peripheral portion of the plane.
Inventors
- 👤 Kazuhiro Nikon Corporation NAKAGAWA
- 👤 Hiroyuki Nikon Corporation HIRAIWA
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 17:11
CPC Classifications
C; C03; C03B; C03B20/00; C03B32/00; C03B19/00; C03B19/14; C03B19/1415; C03B19/1423; C03B19/1453; C03B19/1469; C03B19/1484; C03C; C03C3/00; C03C3/04; C03C3/06; C03B2201/00; C03B2201/02; C03B2207/00; C03B2207/60; C03B2207/62; C03B2207/70; C03C2203/00; C03C2203/50; C03C2203/52; Y; Y10; Y10S; Y10S501/00; Y10S501/90; Y10S501/905
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
175 words
A method of manufacturing a silica glass
member, comprising: a first step of making a silicon compound react in
oxyhydrogen flame using a burner having a multi-tubular
structure to obtain fine silica glass particles; a second step of depositing the fine silica glass
particles on a support rotating and placed to oppose
the burner to obtain a silica glass ingot with a
temperature distribution in at least one plane
perpendicular to a rotational axis of the silica glass
ingot, the temperature distribution being symmetrical
with respect to the rotational axis and having a
maximal value between a center and a peripheral portion
of the plane; and a third step of obtaining a distribution of signed
birefringence values on the basis of birefringence
values and directions of phase advance axes measured at
a plurality of points in the plane perpendicular to the
rotational axis of the silica glass ingot and cutting,
from the silica glass ingot, a silica glass member
whose signed birefringence values monotonously increase
from the center to the peripheral portion of the plane.
Claim 2
Dependent Claim
35 words
A manufacturing method according to claim 1,
wherein in the second step, a difference between the
maximal value and a temperature at the center of the
plane exceeds 0°C and is not more than 200°C.
Claim 3
Independent Claim
146 words
A method of manufacturing a silica glass
member, comprising: a fourth step of heating a silica glass ingot to a
predetermined temperature; a fifth step of cooling the silica glass ingot
with a temperature distribution in at least one plane
perpendicular to a rotational axis of the silica glass
ingot, the temperature distribution being symmetrical
with respect to the rotational axis and having a
maximal value between a center and a peripheral portion
of the plane; and a sixth step of obtaining a distribution of signed
birefringence values on the basis of birefringence
values and directions of phase advance axes measured at
a plurality of points in the plane perpendicular to the
rotational axis of the silica glass ingot and cutting,
from the silica glass ingot, a silica glass member
whose signed birefringence values monotonously increase
from the center to the peripheral portion of the plane.
Claim 4
Dependent Claim
31 words
A manufacturing method according to claim 3,
wherein in the fifth step, a difference between the
maximal value and a temperature at the center of the
plane is 20°C to 300°C.
Claim 5
Dependent Claim
201 words
A silica glass member having a distribution of
signed birefringence values which monotonously increase
from a center to a peripheral portion of the plane,
said silica glass member being obtained by a
manufacturing method comprising: a first step of making a silicon compound react in
oxyhydrogen flame using a burner having a multi-tubular
structure to obtain fine silica glass particles; a second step of depositing the fine silica glass
particles on a support rotating and placed to oppose
the burner to obtain a silica glass ingot with a
temperature distribution in at least one plane
perpendicular to a rotational axis of the silica glass
ingot, the temperature distribution being symmetrical
with respect to the rotational axis and having a
maximal value between the center and the peripheral
portion of the plane; and a third step of obtaining a distribution of signed
birefringence values on the basis of birefringence
values and directions of phase advance axes measured at
a plurality of points in the plane perpendicular to the
rotational axis of the silica glass ingot and cutting,
from the silica glass ingot, a silica glass member
whose signed birefringence values monotonously increase
from the center to the peripheral portion of the plane.
Claim 6
Dependent Claim
36 words
A silica glass member according to claim 5,
wherein in the second step, a difference between the
maximal value and a temperature at the center of the
plane exceeds 0°C and is not more than 200°C.
Claim 7
Dependent Claim
180 words
A silica glass member having a distribution of
signed birefringence values, in which the signed
birefringence values monotonously increase from a
center to a peripheral portion of the plane, said
silica glass member being obtained by a manufacturing
method comprising: a fourth step of heating a silica glass ingot to a
predetermined temperature; a fifth step of cooling the silica glass ingot
with a temperature distribution in at least one plane
perpendicular to a rotational axis of the silica glass
ingot, the temperature distribution being rotationally
symmetrical with respect to the center of the plane and
having a maximal value between the center and the
peripheral portion of the plane; and a sixth step of obtaining a distribution of signed
birefringence values on the basis of birefringence
values and directions of phase advance axes measured at
a plurality of points in the plane perpendicular to the
rotational axis of the silica glass ingot and cutting,
from the silica glass ingot, a silica glass member
whose signed birefringence values monotonously increase
from the center to the peripheral portion of the plane.
Claim 8
Dependent Claim
32 words
A silica glass member according to claim 7,
wherein in the fifth step, a difference between the
maximal value and a temperature at the center of the
plane is 20°C to 300°C.
References Cited (Backward Citations)
No citation records indexed.
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