Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
246 words
A composition for film formation which comprises (A) a product of hydrolysis and condensation obtained
by hydrolyzing and condensing, in the presence of an alkali
catalyst, at least one silane compound selected from the group
consisting of compounds represented by the following formula
(1), compounds represented by the following formula (2), and
compounds represented by the following formula (3), and (B) a product of hydrolysis and condensation obtained
by hydrolyzing and condensing, in the presence of an acid
catalyst, at least one silane compound selected from the group
consisting of compounds represented by the following formula
(1), compounds represented by the following formula (2), and
compounds represented by the following formula (3): R 3 Si(OR 1 ) 4-a wherein R represents hydrogen atom, fluorine atom, or a
monovalent organic group; R 1 represents a monovalent organic
group; and a is an integer of 1 or 2; Si(OR 2 ) 4 wherein R 2 represents a monovalent organic group; R 3 b (R 4 O) 3-b Si-(R 7 ) d -Si(OR 5 ) 3-c R 6 c wherein R 3 to R 6 may be the same or different and each represent
a monovalent organic group; b and c may be the same or different
and each are an integer of 0 to 2; R 7 represents oxygen atom,
a phenylene group, or a group represented by -(CH 2 ) n -, wherein
n is an integer of 1 to 6; and d is 0 or 1.
Claim 2
Dependent Claim
35 words
The composition for film formation as claimed in
claim 1, wherein said product of hydrolysis and condensation
as ingredient (A) has a weight average molecular weight as
determined by GPC of from 50,000 to 10,000,000.
Claim 3
Dependent Claim
35 words
The composition for film formation as claimed in
claim 1, wherein said product of hydrolysis and condensation
as ingredient (B) has a weight average molecular weight as
determined by GPC of from 500 to 300,000.
Claim 4
Dependent Claim
57 words
The composition for film formation as claimed in
any one of claims 1 to 3, wherein said ingredient (A) contains
a product of the hydrolysis and condensation of at least one
compound represented by the formula (2) in an amount of from
5 to 75% by weight (in terms of the product of complete hydrolysis
and condensation).
Claim 5
Dependent Claim
50 words
The composition for film formation as claimed in
any one of claims 1 to 3, wherein said ingredient (A) is a product
of the hydrolysis and condensation of silane compounds
comprising at least one compound represented by the formula (1)
and at least one compound represented by the formula (2).
Claim 6
Dependent Claim
57 words
The composition for film formation as claimed in
any one of claims 1 to 3, which comprises 100 parts by weight
of said ingredient (A) (in terms of the product of complete
hydrolysis and condensation) and from 1 to 900 parts by weight
of said ingredient (B) (in terms of the product of complete
hydrolysis and condensation).
Claim 7
Dependent Claim
23 words
The composition for film formation as claimed in
any one of claims 1 to 3, which has a pH of 7 or lower.
Claim 8
Independent Claim
266 words
A method of film formation which comprises applying
a composition for film formation on a substrate and then heating
the composition, said composition for film formation
comprising: (A) a product of hydrolysis and condensation obtained
by hydrolyzing and condensing, in the presence of an alkali
catalyst, at least one silane compound selected from the group
consisting of compounds represented by the following formula
(1), compounds represented by the following formula (2), and
compounds represented by the following formula (3), and (B) a product of hydrolysis and condensation obtained
by hydrolyzing and condensing, in the presence of an acid
catalyst, at least one silane compound selected from the group
consisting of compounds represented by the following formula
(1), compounds represented by the following formula (2), and
compounds represented by the following formula (3): R a Si(OR 1 ) 4-a wherein R represents hydrogen atom, fluorine atom, or a
monovalent organic group; R 1 represents a monovalent organic
group; and a is an integer of 1 or 2; Si(OR 2 ) 4 wherein R 2 represents a monovalent organic group; R 3 b (R 4 O) 3-b Si-(R 7 ) d Si(OR 5 ) 3-c R 6 c wherein R 3 to R 6 may be the same or different and each represent
a monovalent organic group; b and c may be the same or different
and each are an integer of 0 to 2; R 7 represents oxygen atom,
a phenylene group, or a group represented by -(CH 2 ) n -, wherein
n is an integer of 1 to 6; and d is 0 or 1.
Claim 9
Dependent Claim
15 words
An insulating film obtained by the method of film
formation as claimed in claim 8.
Claim 10
Dependent Claim
12 words
A semiconductor device having the insulating film
as claimed in claim 9.