Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
248 words
A composition for film formation which comprises (A) a product of hydrolysis and condensation obtained by
hydrolyzing and condensing, in the presence of an alkali
catalyst, at least one silane compound selected from the group
consisting of compounds represented by the following formula
(1), compounds represented by the following formula (2), and
compounds represented by the following formula (3) and (B) a product of hydrolysis and condensation obtained by
hydrolyzing and condensing, in the presence of a metal chelate
compound catalyst, at least one silane compound selected from
the group consisting of compounds represented by the following
formula (1), compounds represented by the following formula (2),
and compounds represented by the following formula (3): R a Si(OR 1 ) 4-a wherein R represents hydrogen atom, fluorine atom, or a
monovalent organic group; R 1 represents a monovalent organic
group; and a is an integer of 1 or 2; Si(OR 2 ) 4 wherein R 2 represents a monovalent organic group; R 3 b (R 4 O) 3-b Si-(R 7 ) d -Si(OR 5 ) 3-c R 6 c wherein R 3 to R 6 may be the same or different and each represent
a monovalent organic group; b and c may be the same or different
and each are an integer of 0 to 2; R 7 represents oxygen atom,
a phenylene group, or a group represented by -(CH 2 ) n -, wherein
n is an integer of 1 to 6; and d is 0 or 1.
Claim 2
Dependent Claim
35 words
The composition for film formation as claimed in claim
1, wherein said product of hydrolysis and condensation as
ingredient (A) has a weight average molecular weight as
determined by GPC of from 50,000 to 3,000,000.
Claim 3
Dependent Claim
35 words
The composition for film formation as claimed in claim
1, wherein said product of hydrolysis and condensation as
ingredient (B) has a weight average molecular weight as
determined by GPC of from 500 to 300,000.
Claim 4
Dependent Claim
57 words
The composition for film formation as claimed in any
one of claims 1 to 3, wherein said ingredient (A) contains a
product of the hydrolysis and condensation of at least one
compound represented by the formula (2) in an amount of from
25 to 75% by weight (in terms of the product of complete
hydrolysis and condensation).
Claim 5
Dependent Claim
57 words
The composition for film formation as claimed in any
one of claims 1 to 3, which comprises 100 parts by weight of
said ingredient (A) (in terms of the product of complete
hydrolysis and condensation) and from 1 to 900 parts by weight
of said ingredient (B) (in terms of the product of complete
hydrolysis and condensation).
Claim 6
Independent Claim
268 words
A method of film formation which comprises applying
a composition for film formation on a substrate and then heating
the composition, said composition for film formation comprising (A) a product of hydrolysis and condensation obtained by
hydrolyzing and condensing, in the presence of an alkali
catalyst, at least one silane compound selected from the group
consisting of compounds represented by the following formula
(1), compounds represented by the following formula (2), and
compounds represented by the following formula (3) and (B) a product of hydrolysis and condensation obtained by
hydrolyzing and condensing, in the presence of a metal chelate
compound catalyst, at least one silane compound selected from
the group consisting of compounds represented by the following
formula (1), compounds represented by the following formula (2),
and compounds represented by the following formula (3): R a Si(OR 1 ) 4-a wherein R represents hydrogen atom, fluorine atom, or a
monovalent organic group; R 1 represents a monovalent organic
group; and a is an integer of 1 or 2; Si(OR 2 ) 4 wherein R 2 represents a monovalent organic group; R 3 b (R 4 O) 3-b Si-(R 7 ) d -Si(OR 5 ) 3-c R 6 c wherein R 3 to R 6 may be the same or different and each represent
a monovalent organic group; b and c may be the same or different
and each are an integer of 0 to 2; R 7 represents oxygen atom,
a phenylene group, or a group represented by -(CH 2 ) n -, wherein
n is an integer of 1 to 6; and d is 0 or 1.
Claim 7
Dependent Claim
15 words
An insulating film obtained by the method of film
formation as claimed in claim 6.
Claim 8
Dependent Claim
12 words
A semiconductor device having the insulating film as
claimed in claim 7.