EP1052478A2
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EP
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Planar vibratory gyroscopes
Assignee: The AT&T MVPD Group LLC
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Filing: 2000-05-11
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Granted: —
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Expires: 2020-05-11
Abstract
Abstract Planar vibratory gyroscope structures are provided which are inherently symmetric, which facilitate the use of simple monolithic fabrication processes and which enable the use of sensitive control and sense systems. A planar vibratory member (22) of these structures has a hollow frame (26), a plate (28) that has a plate perimeter (30) and is positioned within the frame (26) and a plurality of elongate beams (32) which couple the plate (28) to the frame (26) wherein each of the beams (32) is proximate to and substantially parallel to a respective portion (30A) of the plate perimeter (30). The exterior rim (34) of the planar member (22) can be supported by a substrate (24) which provides room for easy access to the plate (22) with mode control and sense systems (40, 42).
Inventors
- 👤 Anthony D. Challoner
- 👤 H. Sunada Wallace
- 👤 Donald R. Cargille
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-04 17:15
CPC Classifications
G; G01; G01C; G01C19/00; G01C19/56; G01C19/5719
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
141 words
A vibratory gyroscope (20; 100), characterized by: a planar member (22; 122) having: a) a hollow frame (26; 126); b) a plate (28; 128) having a plate perimeter (30;
130) and positioned within said frame (26;
126); and c) a plurality of elongate beams (32; 132) that
each has a first end (62) coupled to said frame
and a second end (64) coupled to said plate
perimeter (30; 130) so as to be proximate to
the first end (62) of an adjacent one of said
beams (32; 132); a control electrode system (40; 102) spaced from said
plate (28; 128) to facilitate excitation of a
controlled vibration in said plate (28; 128); and a position-sensing system (42; 106) spaced from said plate
(28; 128) to facilitate sensing of a rotation-induced
vibration in said plate that is displaced
from said controlled vibration.
Claim 2
Dependent Claim
33 words
The vibratory gyroscope of claim 1, characterized in
that said beams (32; 132) are oriented to substantially surround
said plate (28; 128) and be everywhere substantially
equidistant from said plate perimeter (30; 130).
Claim 3
Dependent Claim
65 words
The vibratory gyroscope of claim 1 or 2, characterized
in that the hollow frame (26; 126), the plate (28; 128)
and the plurality of elongated beams (32; 132) are defined by a
system (59, 139) of slots (60A-60D; 140) formed by said planar
member (22; 122) with each of said slots (60A-60D; 140) at
least partially interleaved between adjacent ones of said slots
(60A-60D; 140).
Claim 4
Dependent Claim
63 words
The vibratory gyroscope of any of the preceding
claims, characterized in that said control electrode system (40; 102) includes a
plurality of coplanar control electrodes (41A-41D;
103); and said position-sensing system (42; 106) includes a plurality
of coplanar sense electrodes (43A-43D; 107) arranged
in a coplanar relationship with said control
electrodes (41A-41D; 103) and spaced from one side
of said plate (28; 128).
Claim 5
Dependent Claim
96 words
A vibratory member (22; 122) for a gyroscope (20;
100), characterized by a planar member (22; 122) which is formed to define: a) a frame (26; 126); b) a plate (28; 128) positioned within said frame
(22; 122) and having a plate perimeter (30;
130); and c) a plurality of elongate beams (32; 132) that
each has a first end (62) coupled to said frame
and a second end (64) coupled to said plate
perimeter (30; 130) so as to be proximate to
the first end (62) of an adjacent one of said
beams (32; 132).
Claim 6
Dependent Claim
22 words
The vibratory member of claim 5, characterized in
that said beams (32; 132) are oriented to substantially surround
said plate (28; 128).
Claim 7
Dependent Claim
27 words
The vibratory member of claim 5 or 6, characterized
in that each of said beams (32; 132) is everywhere substantially
equidistant from said plate perimeter (30; 130).
Claim 8
Dependent Claim
23 words
The vibratory member of any of claims 5 to 7,
characterized in that said plate perimeter (30; 130) has a substantially
square shape.
Claim 9
Dependent Claim
23 words
The vibratory member of any of claims 5 to 7,
characterized in that said plate perimeter (30; 130) has a substantially
circular shape.
Claim 10
Dependent Claim
68 words
The vibratory member of any of the claims 5 to 9,
characterized in that the hollow frame (26; 126), the plate 28;
128) and the plurality of elongated beams (32; 132) are defined
by a system (59; 139) of slots (60A-60D; 140) formed by said
planar member (22; 122) with each of said slots (60A-60D; 140)
at least partially interleaved between adjacent ones of said
slots (60A-60D; 140).
References Cited (Backward Citations)
No citation records indexed.
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