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EP0935291A1 Expired / Lapsed EP ⏱️ 0.0 years remaining

Controllable solid-state device comprising a tunnel barrier structure

Assignee: Hitachi Ltd
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Filing: 1998-02-06
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Granted: —
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Expires: 2018-02-06
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Abstract

Abstract A controlled conductivity device includes a barrier structure (3) formed of regions of relatively conductive (11,13,11',13') and non-conductive material (10,12) such that in a first condition, charge carrier flow can occur through the structure and in a second condition the regions present a tunnel barrier configuration that inhibits charge carrier flow through the structure, an output region (2) to receive charge carriers that pass along a path through the structure, and an input region (6) for supplying charge carriers to the path so as to pass through the structure to the output region, wherein the regions of non-conductive material are configures so as to provide an energy band profile that comprises guard barrier components (14,16) adjacent the input and output regions respectively, and a main barrier component (15) between the guard barrier components, the main barrier component having a width (w') of 2nm or more, the guard barrier components having a width (w) of 3nm or less and the barriers being spaced apart by 45nm or less, or when the main barrier component has a width of 6nm or more, the barriers are spaced apart by 20nm or less. The device can be used as a memory in which case the output region (2) comprises a memory node to store charge, or as a transistor, in which case the input an output regions comprise a source and drain for charge carriers. A side gate (9) is provided to control current flow.

Inventors

  • 👤 Hiroshi Mizuta
  • 👤 Kazuo Nakazato
  • 👤 Kiyoo Itoh
  • 👤 Toshikazu Schimada
  • 👤 Tatsuya Teshima
  • 👤 Ken Yamaguchi

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-09 01:13
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/60; H10D30/68; H10D30/6891; H10B; H10B10/00; H10B12/00; H10B12/01; H10B12/02; H10B12/03; H10B12/036; H10B12/05; H10B12/053; H10B12/30; H10B12/33; H10D30/681

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 159 words
A controlled conductivity device including a barrier structure formed of regions of relatively conductive and non-conductive material such that in a first condition, charge carrier flow can occur through the structure and in a second condition the regions present a tunnel barrier configuration that inhibits charge carrier flow through the structure, an output region to receive charge carriers that pass along a path through the structure, and an input region for supplying charge carriers to the path so as to pass through the structure to the output region, wherein the regions of non-conductive material are configured so as to provide an energy band profile that comprises guard barrier components adjacent the input and output regions respectively, and a main barrier component between the guard barrier components, the main barrier component having a width of 2nm or more, the guard barrier components having a width of 3nm or less and the barriers being spaced apart by 45 nm or less.
Claim 2
Dependent Claim 28 words
A device according to claim 1 wherein the main barrier component has a width of 6nm or more, and the barriers are spaced apart by 20nm or less.
Claim 3
Dependent Claim 20 words
A device according to claim 1 or 2 including a gate for controlling charge carrier flow through the barrier structure.
Claim 4
Dependent Claim 24 words
A device according to claim 1, 2 or 3 wherein the input region includes an electrode for supplying charge carriers to the barrier structure.
Claim 5
Independent Claim 21 words
A device according to any preceding claim wherein the output region comprises a memory node to store charge from the path.
Claim 6
Independent Claim 30 words
A device according to any one of claims 1 to 4 wherein the input region acts as a source for charge carriers and the output region acts as a drain.
Claim 7
Independent Claim 26 words
A device according to any preceding claim wherein the non conductive regions comprise layers of silicon nitride and the conductive regions comprise layers of intrinsic silicon.
Claim 8
Independent Claim 63 words
A device according to any preceding claim wherein the regions of the barrier structure give rise to a dimensionally relatively wide barrier component across the width of the barrier structure with a relatively low barrier height, and the non-conductive regions give rise to barrier components that are dimensionally relatively narrow compared with the wide barrier component but with a relatively high barrier height.

References Cited (Backward Citations)

JPH0897305A Cited
US5714766A Cited

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