EP0905536A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Optical module
Assignee: NTT Inc
•
Filing: 1998-09-24
•
Granted: —
•
Expires: 2018-09-24
Abstract
Abstract In an optical module having a silicon substrate, a plurality of optical semiconductor devices (30, 31) and optical waveguides (2) for performing transmission of optical signals by the semiconductor devices integrated on the silicon substrate (1, 13), the silicon substrate is doped with an impurity to increase the number of carriers in the silicon substrate for suppressing optical crosstalk between the plurality of optical semiconductor devices, the optical waveguide (2) is composed of a core part (2a) and a peripheral cladding layer (2b) of the core part, or optical fibers each coupled with each of the semiconductor devices, and an electrical resistivity of part or all of the silicon substrate is 0.1Ωcm or less, or a lower part (7) of an optical semiconductor light receiving device is made high in resistance, and a lower part (6) of an optical semiconductor light emitting device is made low in resistance, in which construction, each of the optical semiconductor devices is locally coated with a transparent resin (9), and all the parts protruding upward from the optical waveguide are coated with a light absorbent such as one or plural caps (8, 81).
Inventors
- 👤 Toshikazu Nippon Telegraph and Tel. Co. Hashimoto
- 👤 Yasufumi Nippon Telegraph and Teleph. Co. Yamada
- 👤 Masahiro Nippon Telegraph and Tel. Co. Yanagisawa
- 👤 Kuniharu Nippon Telegraph and Telephone. Co. Kato
- 👤 Yasuyuki Nippon Telegraph and Teleph. Co. Inoue
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-24 02:13
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/24; G02B6/42; G02B6/4201; G02B6/4246
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
66 words
An optical module characterized by comprising: a silicon substrate; a plurality of optical semiconductor devices and
optical waveguides for performing transmission of
optical signals of said optical semiconductor
devices, integrated on said silicon substrate; characterized in that said silicon substrate is
doped with an impurity to increase the number of
carriers in said silicon substrate, thereby
suppressing optical crosstalk between said plurality
of optical semiconductor devices.
Claim 2
Dependent Claim
39 words
The optical module as claimed in Claim 1,
characterized in that said optical waveguide
comprises a core part for coupling said
semiconductor optical devices with each other on
said substrate and a peripheral cladding layer of
said core part.
Claim 3
Dependent Claim
27 words
The optical module as claimed in Claim 2,
characterized in that an electrical resistivity of
one part or all of said silicon substrate is 0.1Ωcm
or less.
Claim 4
Dependent Claim
46 words
The optical module as claimed in Claim 2,
characterized in that a lower part of a light
receiving device of said optical semiconductor is
made high in resistance and a lower part of a light
emitting device of said optical semiconductor is
made low in resistance.
Claim 5
Dependent Claim
33 words
The optical module as claimed in Claim 4,
characterized in that an electrical resistivity of a
lower part of said optical semiconductor light
emitting device is within a range from 0.005 to
0.01Ωcm.
Claim 6
Dependent Claim
22 words
The optical module as claimed in Claim 1,
characterized in that said optical waveguides are
optical fibers coupled with said semiconductor
devices.
Claim 7
Dependent Claim
27 words
The optical module as claimed in Claim 6,
characterized in that an electrical resistivity of
one part or all of said silicon substrate is 0.1Ωcm
or less.
Claim 8
Dependent Claim
42 words
The optical module as claimed in Claim 6,
characterized in that a lower part of said optical
semiconductor light receiving device is made high in
resistance and a lower part of said optical
semiconductor light emitting device is made low in
resistance.
Claim 9
Dependent Claim
33 words
The optical module as claimed in Claim 8,
characterized in that an electrical resistivity of a
lower part of said optical semiconductor light
receiving device is within a range from 0.005 to
0.01Ωcm.
Claim 10
Dependent Claim
25 words
The optical module as claimed in Claim 3,
characterized in that a plurality of grooves are
formed on the back surface of said silicon
substrate.
Claim 11
Dependent Claim
22 words
The optical module as claimed in Claim 3,
characterized in that fine irregularities are formed
on the surface of said silicon substrate.
Claim 12
Dependent Claim
24 words
The optical module as claimed in Claim 3,
characterized in that a light absorbent layer is
formed on the surface of said silicon substrate.
Claim 13
Dependent Claim
43 words
The optical module as claimed in Claim 3,
characterized in that a light blocking layer is
formed on a part of the surface of optical
semiconductor devices other than an optical coupling
part of said optical waveguide with said plurality
of optical devices.
Claim 14
Dependent Claim
61 words
The optical module as claimed in Claim 2,
characterized in that said optical waveguide is an
embedded type optical waveguide of a shape in which
said core part is embedded with said cladding layer,
and a rear side wall of a recess formed in said
cladding layer is formed not to be perpendicular to
an optical axis of said semiconductor device.
Claim 15
Dependent Claim
49 words
The optical module as claimed in Claim 1,
characterized in that said cladding layer other than
the vicinity of said core part is removed to form a
further light blocking area in front or rear of said
recess in such a manner that said optical waveguide
is not divided.
Claim 16
Dependent Claim
48 words
The optical module as claimed in Claim 2,
characterized in that said optical waveguide is an
embedded type optical waveguide of a shape in which
said core part is embedded with said cladding layer,
and said recess formed in said cladding layer is
covered with a transparent resin.
Claim 17
Dependent Claim
66 words
The optical module as claimed in Claim 2,
characterized in that said optical waveguide is an
embedded type optical waveguide of a shape in which
said core part is embedded with said cladding layer,
a light blocking area formed at the rear of said
recess formed in said cladding layer is filled with
a black light blocking substance, and a side wall
thereof is set obliquely.
Claim 18
Dependent Claim
95 words
The optical module as claimed in Claim 2,
characterized in that said optical waveguide is an
embedded type optical waveguide of a shape in which
said core part is embedded with said cladding layer,
having a plurality of recesses formed in said
cladding layer, of which between those as least
disposed side by side in a longitudinal direction of
said optical waveguide, a light blocking area is
formed by removing said cladding layer other than
the vicinity of said core of said optical waveguide
in such a manner that said optical guide is not
divided.
Claim 19
Dependent Claim
33 words
The optical module as claimed in Claim 18,
characterized in that a rear side wall of said
recess is formed not to be perpendicular to the
optical axis of said semiconductor optical device.
Claim 20
Dependent Claim
36 words
The optical module as claimed in Claim 18,
characterized in that a side wall of said light
blocking area is formed not to cross at right angles
with the optical axis of said semiconductor optical
device.
Claim 21
Dependent Claim
39 words
The optical module as claimed in Claim 2,
characterized in that each periphery of said optical
semiconductor devices is locally covered with a
transparent resin, and the entire surface of said
silicon substrate is coated with a light absorbent.
Claim 22
Dependent Claim
55 words
The optical module as claimed in Claim 2,
characterized in that said optical module has a
filter inserted in a groove formed in said optical
waveguide, each of said optical semiconductor
devices is locally covered with a transparent resin,
and all of parts protruding upward from said optical
waveguide are covered with a light absorbent.
Claim 23
Dependent Claim
53 words
The optical module as claimed in Claim 2,
characterized in that said optical module further
includes a filter inserted in a groove formed in
said optical waveguide, each of said optical
semiconductor devices is locally coated with a
transparent resin, and each of them is covered with
a cap as an opaque body.
Claim 24
Dependent Claim
64 words
The optical module as claimed in Claim 2,
characterized in that said optical transmitter and
receiver module further includes a filter inserted
in a groove formed in said optical waveguide, each
of said optical semiconductor devices is locally
coated with a transparent resin, and the entire
parts protruding upward from said optical waveguide
are all covered with a single cap as an opaque body.
References Cited (Backward Citations)
No citation records indexed.
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