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EP0874193A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Method and apparatus for dry vapor generation

Assignee: Applied Materials Inc
•
Filing: 1995-04-18
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Granted: —
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Expires: 2015-04-18
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Abstract

Abstract A method and apparatus for dry vapor generation. A manifold assembly with a channel conveys liquid from a liquid source to a vessel (12) secured to the manifold assembly. The vessel includes a fill tube (152) connected to the manifold assembly's channel, and a settling chamber (14). A heater (150) heats liquid in the vessel to generate a vapor that enters the settling chamber (14) through its vapor inlet. The manifold assembly comprises two blocks in mating engagement wherein the outlet port of the first block is aligned with the inlet port of the second block. The outlet port of the second port block is connected to the vessels fill tube.

Inventors

  • 👤 Peter F. Ebbing
  • 👤 Kien N. Chuc

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-08 19:02
CPC Classifications
B; B01; B01D; B01D1/00; B01D1/30; B01D1/305; H; H10; H10P; H10P52/00; F; F22; F22B; F22B1/00; F22B1/28; F22B1/284

Claims Analysis

Total Claims: 32
Claim 1
Independent Claim 175 words
An apparatus for generating dry vapor, comprising: a manifold assembly (10) with a channel for conveying a liquid from a liquid source; a vessel (12) for holding the liquid, the vessel (12) being secured to the manifold assembly (10) and having a fill tube (152) connected to the manifold assembly's channel for receiving liquid from the channel, a heater (150) for heating the liquid in the vessel to generate a vapor; a settling chamber (14) for settling out liquid drops in the vapor; wherein the manifold assembly (10) comprises a first block (20) and a second block (38), each block having an inlet port, an outlet port, a channel connecting the ports, and a mating surface for mating with the mating surface of the other block; and wherein the first block (20) and the second block (38) are in mating engagement at their mating surfaces such that the first block's outlet port is aligned with the second block's inlet port; and wherein the second block's outlet port is connected to the vessel's fill tube (152).
Claim 2
Dependent Claim 23 words
The apparatus of claim 1, wherein the settling chamber (14) is located within the vessel (12) above the liquid in the vessel (12).
Claim 3
Dependent Claim 45 words
The apparatus of claim 1 or 2, wherein the settling chamber (14) includes a vapor inlet (178) with a cross-section that is substantially smaller than the vessel's cross-section for receiving vapor, and a vapor outlet (158) for removing dry vapor from the settling chamber (14).
Claim 4
Independent Claim 15 words
The apparatus of any of the preceding claims, wherein the liquid comprises a base liquid.
Claim 5
Dependent Claim 11 words
The apparatus of claim 4, wherein the base liquid comprises water.
Claim 6
Independent Claim 15 words
The apparatus any of claims 1-5, wherein each block is a parallelepiped with perpendicular walls.
Claim 7
Dependent Claim 29 words
The apparatus of claim 5 or 6, wherein the first block's mating surface is substantially the same shape and substantially the same size as the second block's mating surface.
Claim 8
Independent Claim 79 words
The apparatus of claims 5 to 7, wherein the first block (20) further includes: a second outlet port connected to the first block's channel; and a three way valve (32) in the first block's channel, the valve having an inlet for receiving liquid from the first block's inlet port (22), a first outlet for transmitting liquid to the first block's first outlet port (26), and a second outlet for transmitting liquid to the first block's second outlet port (28).
Claim 9
Independent Claim 120 words
The apparatus of claims 5 to 8, wherein: the first block's inlet port is adapted for engagement with the liquid source; the manifold assembly further includes a third block (64) having an inlet port (66) adapted for engagement with a gas source, an outlet port (70), a channel (72) connecting the ports, and a mating surface; and the second block (38) includes a second inlet port (78) connected to its channel and a second mating surface in mating engagement with the third block's mating surface such that the third block's outlet port (70) is aligned with the second block's second inlet port (78), and the second block's channel provides the liquid and the gas to the second block's outlet port.
Claim 10
Dependent Claim 10 words
The apparatus of claim 9, wherein the gas comprises nitrogen.
Claim 11
Independent Claim 89 words
The apparatus of claims 5 to 10, wherein: the second block further includes a third mating surface; and the manifold assembly further includes a fourth block (86) positioned between the second block (38) and the vessel (12) and having an inlet port (88), an outlet port (90) connected to the vessel's fill tube (152), a channel (92) connecting the ports, and a mating surface in mating engagement with the second block's third mating surface such that the second block's outlet port is aligned with the fourth block's inlet port.
Claim 12
Independent Claim 48 words
The apparatus of claims 5 to 11, wherein: the vessel (12) further includes a drain for removing the liquid from the vessel; and the third block includes a second inlet port aligned with the vessel's drain, a second outlet port, and a second channel connecting the second ports.
Claim 13
Independent Claim 67 words
The apparatus of claims 5 to 12, wherein the second block further includes: a pressure reducer (48) connected between the second block's channel (52) and the second block's first inlet port (40), the pressure reducer (48) acting to maintain a substantially steady pressure of the liquid flowing through the second block's channel by reducing the pressure of the liquid received through the second block's first inlet port.
Claim 14
Dependent Claim 53 words
The apparatus of claim 13, wherein the pressure reducer comprises: a channel (54), and at least two spacers (56,58), each spacer being sized and shaped to obstruct the channel, and each spacer having an orifice (60) with a diameter that is smaller than the diameter of the second block's first inlet port (40).
Claim 15
Dependent Claim 28 words
The apparatus of claim 13 or 14, wherein the pressure reducer includes two spacers and the first spacer's (56) orifice is offset from the second spacer's (58) orifice.
Claim 16
Independent Claim 21 words
The apparatus of any of the preceding claims, wherein the vessel (12) and the settling chamber (14) are made from quartz.
Claim 17
Independent Claim 31 words
The apparatus of any of the preceding claims, wherein the diameter of the vessel (12) is sized to generate vapor at a rate of about one liter of vapor per minute.
Claim 18
Independent Claim 22 words
The apparatus of any of the preceding claims, wherein the diameter of the vessel (12) is about 5.08 cm (about 2 inches).
Claim 19
Independent Claim 23 words
The apparatus of any of the preceding claims, wherein the vessel (12) further includes a drain for removing the liquid from the vessel.
Claim 20
Independent Claim 35 words
The apparatus of any of the preceding claims, wherein the vessel (12) further includes a thermo-well tube (154) for use with a temperature sensor (156) to determine the temperature of the liquid in the vessel.
Claim 21
Independent Claim 17 words
The apparatus of any of the preceding claims, wherein the vessel (12) further includes boiling chips (170).
Claim 22
Dependent Claim 13 words
The apparatus of claim 21, wherein the boiling chips (170) are polytetrafluoroethylene chips.
Claim 23
Independent Claim 56 words
The apparatus of any of the preceding claims, wherein the settling chamber includes: a sloped bottom wall (180); a top wall; and the vapor inlet (178) is an opening located at the lower end of the bottom wall, and the vapor outlet is located in the top wall above the upper end of the bottom wall.
Claim 24
Independent Claim 59 words
The apparatus of any of the preceding claims, wherein the wall of the vessel further includes: at least two viewing ports (166); and at least one Sensor assembly (168) including one emitter and one receiver, located outside of the vessel (12), for sensing the level of the liquid in the vessel through the at least two viewing ports (166).
Claim 25
Independent Claim 68 words
The apparatus of any of the preceding claims, further comprising a second settling chamber (8) located within the vessel (12) above the first settling chamber for settling out liquid drops in the vapor, the second settling chamber having a second vapor inlet (182) for receiving vapor from the first settling chamber's vapor outlet, and having a second vapor outlet for removing dry vapor from the second settling chamber.
Claim 26
Dependent Claim 62 words
The apparatus of claim 25, wherein the second settling chamber includes: a sloped bottom wall (176); a top wall; and the second vapor inlet (182) is an opening located at the lower end of the second settling chamber's bottom wall, and the second vapor outlet is located in the top wall above the upper end of the second settling chamber's bottom wall.
Claim 27
Independent Claim 208 words
A method for providing dry vapor, comprising: conveying a liquid from a liquid source by means of a manifold assembly (10) with a channel to a vessel for holding the liquid; wherein said vessel is secured to the manifold assembly (10) and has a fill tube (152) connected to the manifold assembly's channel for receiving liquid from the channel, wherein the manifold assembly (10) comprises a first block (20) and a second block (38), each block having an inlet port, an outlet port, a channel connecting the ports, and a mating surface for mating with the mating surface of the other block; and wherein the first block (20) and the second block (38) are in mating engagement at their mating surfaces such that the first block's outlet port is aligned with the second block's inlet port; and wherein the second block's outlet port is connected to the vessel's fill tube (152). heating the liquid in the vessel to generate a vapor; transporting the vapor to a settling chamber; decreasing the speed of the vapor in the settling chamber, thereby allowing liquid drops to settle out of the vapor; returning the liquid drops to the bottom of the vessel; and transporting the dry vapor out of the settling chamber.
Claim 28
Dependent Claim 23 words
The method of claim 27 wherein the settling chamber (14) is located within the vessel (12) above the liquid in the vessel (12).
Claim 29
Dependent Claim 33 words
The method of claim 27 or 28, wherein the vapor is transported to the settling chamber (14) through a vapor inlet (178) having a cross-section that is substantially smaller than the vessel's cross-section.
Claim 30
Independent Claim 14 words
The method of claims 27 to 29, wherein the liquid comprises a base liquid.
Claim 31
Dependent Claim 11 words
The method of claim 30, wherein the base liquid comprises water.
Claim 32
Independent Claim 65 words
The method of claims 27 to 31, further comprising: transporting the vapor from the settling chamber to a second settling chamber; decreasing the speed of the vapor in the second settling chamber, thereby allowing additional liquid drops to settle out of the vapor; returning the additional liquid drops to the bottom of the vessel; and transporting the dry vapor out of the second settling chamber.

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