EP0863533A1
Expired / Lapsed
EP
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Electron emission device and display device using the same
Assignee: Pioneer Corp
•
Filing: 1998-03-04
•
Granted: —
•
Expires: 2018-03-04
Abstract
Abstract An electron emission device exhibits a high electron emission efficiency. The device includes an electron supply layer (12) of metal or semiconductor, an insulator layer (13) formed on the electron supply layer (12), and a thin-film metal electrode (15) formed on the insulator layer (13). The insulator layer is (13) made of a dielectric substance and has a film thickness of 50 nm or greater. When an electric field is applied between the electron supply layer (12) and the thin-film metal electrode (15), the electron emission device emits electrons.
Inventors
- 👤 Nobuyasu c/o Pioneer Electronic Corp. Negishi
- 👤 Takamasa C/O Pioneer Electronic Corp. Yoshikawa
- 👤 Takashi c/o Pioneer Electronic Corp. Chuman
- 👤 Kiyohide C/O Pioneer Electronic Corp. Ogasawara
- 👤 Shingo c/o Pioneer Electronic Corp. Iwasaki
- 👤 Hiroshi c/o Pioneer Electronic Corp. Ito
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 02:27
CPC Classifications
H; H01; H01J; H01J1/00; H01J1/02; H01J1/30; H01J1/312; B; B82; B82Y; B82Y10/00; H01J2329/00
Claims Analysis
Total Claims: 39
Claim 1
Independent Claim
82 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer;
and a thin-film metal electrode formed on the insulator layer
and facing a vacuum space, characterized in that said insulator layer is made of a
dielectric substance and has a film thickness of 50 nm or greater,
whereby the electron emission device emits electrons when an
electric field is applied between the electron supply layer and
the thin-film metal electrode.
Claim 2
Dependent Claim
109 words
An electron emission display device comprising: a pair of first and second substrates facing each other
with a vacuum space in between; a plurality of electron emission devices provided on the
first substrate; a collector electrode provided in the second substrate;
and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an
electron supply layer of metal or semiconductor; an insulator
layer formed on the electron supply layer; and a thin-film metal
electrode formed on the insulator layer and facing a vacuum space,
wherein said insulator layer is made of a dielectric substance
and has a film thickness of 50 nm or greater.
Claim 3
Dependent Claim
164 words
An electron emission display device comprising: a pair of a device substrate and a transparent substrate
facing each other with a vacuum space in between; a plurality of ohmic electrodes formed in parallel on an
inner surface of the device substrate; a plurality of electron emission devices provided on the
ohmic electrodes, each of the electron emission devices
comprising an electron supply layer of metal or semiconductor;
an insulator layer formed on the electron supply layer; and a
thin-film metal electrode formed on the insulator layer and
facing the vacuum space, wherein said insulator layer is made
of a dielectric substance and has a film thickness of 50 nm or
greater; a plurality of bus electrodes formed on parts of the
thin-film metal electrodes and extending in parallel to one
another and perpendicular to the ohmic electrodes so as to
electrically connect adjoining thin-film metal electrodes; a plurality of collector electrodes provided in the
transparent substrate; and fluorescent layers formed on the collector electrodes.
Claim 4
Dependent Claim
35 words
An electron emission display device according to claim
3 further comprising a second auxiliary insulator layer with
openings formed to separate the surfaces of the thin-film metal
electrodes into a plurality of electron emission regions.
Claim 5
Dependent Claim
19 words
An electron emission display device according to claim
4, wherein the second auxiliary insulator layer covers the bus
electrodes.
Claim 6
Dependent Claim
90 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer;
and a thin-film metal electrode formed on the insulator layer
and facing a vacuum space, characterized in that said insulator layer is made of a
dielectric substance with a dielectric constant of 8 or less and
has a film thickness of 50 nm or greater, whereby the electron
emission device emits electrons when an electric field is applied
between the electron supply layer and the thin-film metal
electrode.
Claim 7
Dependent Claim
117 words
An electron emission display device comprising: a pair of first and second substrates facing each other
with a vacuum space in between; a plurality of electron emission devices provided on the
first substrate; a collector electrode provided in the second substrate;
and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an
electron supply layer of metal or semiconductor; an insulator
layer formed on the electron supply layer; and a thin-film metal
electrode formed on the insulator layer and facing a vacuum space,
wherein said insulator layer is made of a dielectric substance
with a dielectric constant of 8 or less and has a film thickness
of 50 nm or greater.
Claim 8
Dependent Claim
82 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer;
and a thin-film metal electrode formed on the insulator layer
and facing a vacuum space, characterized in that said insulator layer has a film
thickness of 50 nm or greater and said electron supply layer is
transparent, whereby the electron emission device emits
electrons when an electric field is applied between the electron
supply layer and the thin-film metal electrode.
Claim 9
Dependent Claim
109 words
An electron emission display device comprising: a pair of first and second substrates facing each other
with a vacuum space in between; a plurality of electron emission devices provided on the
first substrate; a collector electrode provided in the second substrate;
and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an
electron supply layer of metal or semiconductor; an insulator
layer formed on the electron supply layer; and a thin-film metal
electrode formed on the insulator layer and facing a vacuum space,
wherein said insulator layer has a film thickness of 50 nm or
greater and said electron supply layer is transparent.
Claim 10
Dependent Claim
33 words
An electron emission display device according to claim
9, wherein said first substrate is transparent, and further
comprising a transparent electrode which is disposed between said
first substrate and said electron supply layer.
Claim 11
Dependent Claim
106 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer;
and a thin-film metal electrode formed on the insulator layer
and facing a vacuum space, characterized in that said insulator layer is made of
silicon oxide as a major component of SiO x where x represents an
atomic ratio in a range of from 0.5 to 2 in a whole layer and
has a film thickness of 50 nm or greater, whereby the electron
emission device emits electrons when an electric field is applied
between the electron supply layer and the thin-film metal
electrode.
Claim 12
Dependent Claim
106 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer;
and a thin-film metal electrode formed on the insulator layer
and facing a vacuum space, characterized in that said insulator layer is made of
silicon oxide as a major component of SiO x where x represents an
atomic ratio satisfying a refractive index in a range of from
1.3 to 3.0 and has a film thickness of 50 nm or greater, whereby
the electron emission device emits electrons when an electric
field is applied between the electron supply layer and the
thin-film metal electrode.
Claim 13
Dependent Claim
133 words
An electron emission display device comprising: a pair of first and second substrates facing each other
with a vacuum space in between; a plurality of electron emission devices provided on the
first substrate; a collector electrode provided in the second substrate;
and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an
electron supply layer of metal or semiconductor; an insulator
layer formed on the electron supply layer; and a thin-film metal
electrode formed on the insulator layer and facing a vacuum space,
wherein said insulator layer is made of silicon oxide as a major
component of SiO x where x represents an atomic ratio in a range
of from 0.5 to 2 in a whole layer and has a film thickness of
50 nm or greater.
Claim 14
Dependent Claim
188 words
An electron emission display device comprising: a pair of a device substrate and a transparent substrate
facing each other with a vacuum space in between; a plurality of ohmic electrodes formed in parallel on an
inner surface of the device substrate; a plurality of electron emission devices provided on the
ohmic electrodes, each of the electron emission devices
comprising an electron supply layer of metal or semiconductor;
an insulator layer formed on the electron supply layer; and a
thin-film metal electrode formed on the insulator layer and
facing the vacuum space, wherein said insulator layer is made
of silicon oxide as a major component of SiO x where x represents
an atomic ratio in a range of from 0.5 to 2 in a whole layer and
has a film thickness of 50 nm or greater; a plurality of bus electrodes formed on parts of the
thin-film metal electrodes and extending in parallel to one
another and perpendicular to the ohmic electrodes so as to
electrically connect adjoining thin-film metal electrodes; a plurality of collector electrodes provided in the
transparent substrate; and fluorescent layers formed on the collector electrodes.
Claim 15
Dependent Claim
35 words
An electron emission display device according to claim
14 further comprising a second auxiliary insulator layer with
openings formed to separate the surfaces of the thin-film metal
electrodes into a plurality of electron emission regions.
Claim 16
Dependent Claim
19 words
An electron emission display device according to claim
15, wherein the second auxiliary insulator layer covers the bus
electrodes.
Claim 17
Dependent Claim
96 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer;
and a thin-film metal electrode formed on the insulator layer
and facing a vacuum space, characterized in that one of said thin-film metal electrode
and said insulator layer is provided with a region containing
atomic elements each having a work function which is lower than
that of said thin-film metal electrode, whereby the electron
emission device emits electrons when an electric field is applied
between the electron supply layer and the thin-film metal
electrode.
Claim 18
Dependent Claim
26 words
An electron emission display device according to claim
17, wherein said region is an intermediate layer disposed between
said thin-film metal electrode and said insulator layer.
Claim 19
Dependent Claim
33 words
An electron emission display device according to claim
17, wherein said region is an electron emission layer disposed
on an outer surface of said thin-film metal electrode at a side
of electron emission.
Claim 20
Dependent Claim
27 words
An electron emission display device according to claim
17, wherein said region is disposed so as to be dispersed as a
layer within said thin-film metal electrode.
Claim 21
Dependent Claim
26 words
An electron emission display device according to claim
17, wherein said region is disposed so as to be dispersed as a
layer within said insulator layer.
Claim 22
Dependent Claim
123 words
An electron emission display device comprising: a pair of first and second substrates facing each other
with a vacuum space in between; a plurality of electron emission devices provided on the
first substrate; a collector electrode provided in the second substrate;
and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an
electron supply layer of metal or semiconductor; an insulator
layer formed on the electron supply layer; and a thin-film metal
electrode formed on the insulator layer and facing a vacuum space,
wherein one of said thin-film metal electrode and said insulator
layer is provided with a region containing atomic elements each
having a work function which is lower than that of said thin-film
metal electrode.
Claim 23
Dependent Claim
85 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer;
and a thin-film metal electrode formed on the insulator layer
and facing a vacuum space, characterized in that said insulator layer has a film
thickness of 50 nm or greater and is provided with one or more
thermal conductive layers, whereby the electron emission device
emits electrons when an electric field is applied between the
electron supply layer and the thin-film metal electrode.
Claim 24
Dependent Claim
112 words
An electron emission display device comprising: a pair of first and second substrates facing each other
with a vacuum space in between; a plurality of electron emission devices provided on the
first substrate; a collector electrode provided in the second substrate;
and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an
electron supply layer of metal or semiconductor; an insulator
layer formed on the electron supply layer; and a thin-film metal
electrode formed on the insulator layer and facing a vacuum space,
wherein said insulator layer has a film thickness of 50 nm or
greater and is provided with one or more thermal conductive
layers.
Claim 25
Dependent Claim
120 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer;
and a thin-film metal electrode formed on the insulator layer
and facing a vacuum space, characterized in that said insulator layer is made of a
dielectric substance and has a film thickness of 50 nm or greater
which is formed through a sputtering by using a mixture gas
essentially comprising a rare gas under a sputtering condition
of a gas pressure of 0.1 to 100 mTorr and a forming rate of 0.5
to 100 nm/min, whereby the electron emission device emits
electrons when an electric field is applied between the electron
supply layer and the thin-film metal electrode.
Claim 26
Dependent Claim
147 words
An electron emission display device comprising: a pair of first and second substrates facing each other
with a vacuum space in between; a plurality of electron emission devices provided on the
first substrate; a collector electrode provided in the second substrate;
and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an
electron supply layer of metal or semiconductor; an insulator
layer formed on the electron supply layer; and a thin-film metal
electrode formed on the insulator layer and facing a vacuum space,
wherein said insulator layer is made of a dielectric substance
and has a film thickness of 50 nm or greater which is formed through
a sputtering by using a mixture gas essentially comprising a rare
gas under a sputtering condition of a gas pressure of 0.1 to 100
mTorr and a forming rate of 0.5 to 100 nm/min.
Claim 27
Dependent Claim
202 words
An electron emission display device comprising: a pair of a device substrate and a transparent substrate
facing each other with a vacuum space in between; a plurality of ohmic electrodes formed in parallel on an
inner surface of the device substrate; a plurality of electron emission devices provided on the
ohmic electrodes, each of the electron emission devices
comprising an electron supply layer of metal or semiconductor;
an insulator layer formed on the electron supply layer; and a
thin-film metal electrode formed on the insulator layer and
facing the vacuum space, wherein said insulator layer is made
of a dielectric substance and has a film thickness of 50 nm or
greater which is formed through a sputtering by using a mixture
gas essentially comprising a rare gas under a sputtering
condition of a gas pressure of 0.1 to 100 mTorr and a forming
rate of 0.5 to 100 nm/min; a plurality of bus electrodes formed on parts of the
thin-film metal electrodes and extending in parallel to one
another and perpendicular to the ohmic electrodes so as to
electrically connect adjoining thin-film metal electrodes; a plurality of collector electrodes provided in the
transparent substrate; and fluorescent layers formed on the collector electrodes.
Claim 28
Dependent Claim
35 words
An electron emission display device according to claim
27 further comprising a second auxiliary insulator layer with
openings formed to separate the surfaces of the thin-film metal
electrodes into a plurality of electron emission regions.
Claim 29
Dependent Claim
19 words
An electron emission display device according to claim
28, wherein the second auxiliary insulator layer covers the bus
electrodes.
Claim 30
Dependent Claim
78 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer;
and a thin-film metal electrode formed on the insulator layer
and facing a vacuum space, characterized in that said insulator layer has a smoothed
surface layer for contacting with said thin-film metal electrode,
whereby the electron emission device emits electrons when an
electric field is applied between the electron supply layer and
the thin-film metal electrode.
Claim 31
Dependent Claim
72 words
An electron emission device according to claim 30,
wherein said insulator layer is made of a dielectric substance
and has a film thickness of 50 nm or greater which is formed through
a sputtering method under a sputtering condition in which a gas
pressure or a forming rate for said surface layer of said insulator
layer is lower than that for a portion other than said surface
layer of said insulator layer.
Claim 32
Dependent Claim
117 words
An electron emission device according to claim 30,
wherein said insulator layer is made of a dielectric substance
and has a film thickness of 50 nm or greater which is formed through
a sputtering method by using a mixture gas essentially comprising
a rare gas in such a manner that a portion other than said surface
layer of said insulator layer is deposited under a sputtering
condition of a gas pressure of 2 to 100 mTorr and a forming rate
of 0.1 to 100 nm/min before said surface layer of said insulator
layer is deposited under a sputtering condition of a gas pressure
of 0.1 to 1 mTorr and a forming rate of 0.1 to 100 nm/min.
Claim 33
Dependent Claim
117 words
An electron emission device according to claim 30,
wherein said insulator layer is made of a dielectric substance
and has a film thickness of 50 nm or greater which is formed through
a sputtering method by using a mixture gas essentially comprising
a rare gas in such a manner that a portion other than said surface
layer of said insulator layer is deposited under a sputtering
condition of a gas pressure of 0.1 to 100 mTorr and a forming
rate of 20 to 100 nm/min before said surface layer of said
insulator layer is deposited under a sputtering condition of a
gas pressure of 0.1 to 100 mTorr and a forming rate of 0.1 to
10 nm/min.
Claim 34
Dependent Claim
16 words
An electron emission device according to claim 33,
wherein said mixture gas contains xenon or krypton.
Claim 35
Dependent Claim
39 words
An electron emission device according to claim 30,
wherein an electric resistance of said surface layer for
contacting with said thin-film metal electrode is higher than
that of a portion other than said surface layer of said insulator
layer.
Claim 36
Dependent Claim
28 words
An electron emission device according to claim 30,
wherein an electric resistance of said surface layer for
contacting with said thin-film metal electrode is smoothed by
a sputter-etching.
Claim 37
Dependent Claim
25 words
An electron emission device according to claim 30,
wherein said electron supply layer is made of silicon and said
insulator is made of silicon oxide.
Claim 38
Dependent Claim
105 words
An electron emission display device comprising: a pair of first and second substrates facing each other
with a vacuum space in between; a plurality of electron emission devices provided on the
first substrate; a collector electrode provided in the second substrate;
and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an
electron supply layer of metal or semiconductor; an insulator
layer formed on the electron supply layer; and a thin-film metal
electrode formed on the insulator layer and facing a vacuum space,
wherein said insulator layer has a smoothed surface layer for
contacting with said thin-film metal electrode.
Claim 39
Dependent Claim
16 words
An electron emission device according to claim 34,
wherein said mixture gas contains xenon or krypton.
References Cited (Backward Citations)
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