EP0858110A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Separating method, method for transferring thin film device, thin film device, thin film integrated circuit device, and liquid crystal display device manufactured by using the transferring method
Assignee: Seiko Epson Corp
•
Filing: 1997-08-26
•
Granted: —
•
Expires: 2017-08-26
Abstract
Abstract A method for transferring a thin film device on a substrate onto a transfer member, includes: a step for forming a separation layer on the substrate, a step for forming a transferred layer including the thin film device on the separation layer, a step for adhering the transferred layer including the thin film device to the transfer member with an adhesive layer therebetween, a step for irradiating the separation layer with light so as to form internal and/or interfacial exfoliation of the separation layer, and a step for detaching the substrate from the separation layer. <IMAGE>
Inventors
- 👤 Tatsuya Seiko Epson Corporation SHIMODA
- 👤 Satoshi Seiko Epson Corporation INOUE
- 👤 Wakao Seiko Epson Corporation MIYAZAWA
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-05 09:54
CPC Classifications
H; H10; H10D; H10D86/00; H10D86/01; H10D86/021; H10D86/0214; G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/1345; G02F1/13454; G02F1/136; G02F1/13613; G02F1/1362; G02F1/1368; H10D86/40; H10D86/60; H10P; H10P72/00; H10P72/70; H10P72/74; H10P72/7448; H10P90/00; H10P90/19; H10P90/1904; H10P90/1906; H10P90/1914; H10P90/1916; H10P90/1924; H10W; H10W10/00; H10W10/10; H10W10/181; H10D30/00; H10D30/60; H10D30/67; H10D30/6758; H10P72/743; H10P72/7432
Claims Analysis
Total Claims: 77
Claim 1
Independent Claim
53 words
An exfoliating method for exfoliating a detached
member, which is present on a substrate with a separation layer
therebetween, from said substrate, wherein said separation layer is irradiated with
incident light so as to cause exfoliation in said separation
layer and/or at the interface, and to detach said detached
member from said substrate.
Claim 2
Dependent Claim
62 words
An exfoliating method for exfoliating a detached
member, which is present on a transparent substrate with a
separation layer therebetween, from said transparent
substrate, wherein said separation layer is irradiated with
incident light from the side of said transparent substrate
so as to cause exfoliation in said separation layer and/or
at the interface, and to detach said detached member from said
substrate.
Claim 3
Dependent Claim
84 words
An exfoliating method for exfoliating a transferred
layer, formed on a substrate with a separation layer
therebetween, from said substrate and for transferring said
transferred layer onto a transfer member, wherein after said transfer member is adhered to the
Opposite side of said transferred layer to said substrate, said separation layer is irradiated with incident light
so as to cause exfoliation in said separation layer and/or
at the interface, and to detach said transferred layer from
said substrate to transfer onto said transfer member.
Claim 4
Dependent Claim
95 words
An exfoliating method for exfoliating a transferred
layer, formed on a transparent substrate with a separation
layer therebetween, from said transparent substrate and for
transferring said transferred layer onto a transfer member, wherein after said transfer member is adhered to the
opposite side of said transferred layer to said transparent
substrate, said separation layer is irradiated with incident light
from the side of said transparent substrate so as to cause
exfoliation in said separation layer and/or at the interface,
and to detach said transferred layer from said transparent
substrate to transfer onto said transfer member.
Claim 5
Dependent Claim
91 words
An exfoliating method comprising the following
steps of: forming a separation layer on a transparent substrate, forming a transferred layer on said separation layer
directly or with a given interlayer therebetween, adhering said transfer member to the opposite side of
said transferred layer to said transparent substrate, and irradiating said separation layer with incident light
from the side of said transparent substrate so as to cause
exfoliation in said separation layer and/or at the interface,
and to detach said transferred layer from said transparent
substrate to transfer onto said transfer member.
Claim 6
Dependent Claim
42 words
The exfoliating method according to claim 5, wherein
said exfoliating method further comprises a step for removing
said separation layer adhered to the side of said transparent
substrate and/or transfer member, after the transfer of said
transferred layer onto said transfer member.
Claim 7
Dependent Claim
26 words
The exfoliating method according to any one of
claims 3 to 6, wherein said transferred layer is a functional
thin film or a thin film device.
Claim 8
Dependent Claim
21 words
The exfoliating method according to any one of
claims 3 to 6, wherein said transferred layer is a thin film
transistor.
Claim 9
Dependent Claim
20 words
The exfoliating method according to any one of
claims 3 to 8, wherein said transfer member is a transparent
substrate.
Claim 10
Dependent Claim
46 words
The exfoliating method according to any one of
claims 3 to 9, wherein when the maximum temperature in the
formation of said transferred layer is Tmax, said transfer
member comprises a material having a glass transition point
(Tg) or softening point which is lower than Tmax.
Claim 11
Dependent Claim
34 words
The exfoliating method according to any one of
claims 3 to 10, wherein said transfer member comprises a
material having a glass transition point (Tg) or softening
point which is lower than 800 °C.
Claim 12
Dependent Claim
22 words
The exfoliating method according to any one of
claims 3 to 11, wherein said transfer member comprises a
synthetic resin or glass.
Claim 13
Dependent Claim
18 words
The exfoliating method according to any one of
claims 1 to 12, wherein said substrate has thermal resistance.
Claim 14
Dependent Claim
40 words
The exfoliating method according to any one of
claims 3 to 12, wherein when the maximum temperature in the
formation of said transferred layer is Tmax, said substrate
comprises a material having a distortion point which is lower
than Tmax.
Claim 15
Dependent Claim
44 words
The exfoliating method according to any one of
claims 1 to 14, wherein the exfoliation of said separation
layer is caused by an elimination of or a decrease in the
adhering force between atoms or molecules in the constituent
substances in said separation layer.
Claim 16
Dependent Claim
19 words
The exfoliating method according to any one of
claims 1 to 15, wherein said incident light is laser light.
Claim 17
Dependent Claim
20 words
The exfoliating method according to claim 16,
wherein said laser light has a wavelength of 100 nm to 350
nm.
Claim 18
Dependent Claim
20 words
The exfoliating method according to claim 16,
wherein said laser light has a wavelength of 350 nm to 1,200
nm.
Claim 19
Dependent Claim
19 words
The exfoliating method according to any one of
claims 1 to 18, wherein said separation layer comprises
amorphous silicon.
Claim 20
Dependent Claim
20 words
The exfoliating method according to claim 19,
wherein said amorphous silicon contains 2 atomic percent or
more of hydrogen (H).
Claim 21
Dependent Claim
19 words
The exfoliating method according to any one of
claims 1 to 18, wherein said separation layer comprises a
ceramic.
Claim 22
Dependent Claim
19 words
The exfoliating method according to any one of
claims 1 to 18, wherein said separation layer comprises a
metal.
Claim 23
Dependent Claim
20 words
The exfoliating method according to any one of
claims 1 to 18, wherein said separation layer comprises an
organic polymer.
Claim 24
Dependent Claim
32 words
The exfoliating method according to claim 23,
wherein said organic polymer has at least one adhere selected
from the group consisting of -CH 2 -, -CO-, -CONH-, -NH-, -COO-,
-N=N-, and -CH=N-.
Claim 25
Dependent Claim
23 words
The exfoliating method according to either claim
23 or 24, wherein said organic polymer has an aromatic
hydrocarbon group in the chemical formula.
Claim 26
Dependent Claim
25 words
The exfoliating method according to any one of
claims 1 to 25, wherein said separation layer comprises a
composite material including a plurality of sub-layers.
Claim 27
Dependent Claim
21 words
The exfoliating method according to claim 26,
wherein said separation layer comprises at least two sub-layers
having different compositions or characteristics.
Claim 28
Dependent Claim
38 words
The exfoliating method according to either claim
26 or 27, wherein said separation layer comprises an optical
absorption layer for absorbing said incident light and another
layer having a different composition or property from said
optical absorption layer.
Claim 29
Dependent Claim
35 words
The exfoliating method according to any one of
claims 26 to 28, wherein said separation layer comprises an
optical absorption layer for absorbing said incident light
and a shading layer for shading said incident light.
Claim 30
Dependent Claim
30 words
The exfoliating method according to any one of
claims 1 to 29, wherein said shading layer lies at the opposite
side of said optical absorption layer to said incident light.
Claim 31
Dependent Claim
23 words
The exfoliating method according to either claim
29 or 30, wherein said shading layer is a reflection layer
for reflecting said incident light.
Claim 32
Dependent Claim
16 words
The exfoliating method according to claim 31,
wherein said reflection layer comprises a metallic thin film.
Claim 33
Dependent Claim
40 words
The exfoliating method according to any one of
claims 28 to 32, wherein the exfoliation of said separation
layer occurs by elimination or reduction of the adhering force
between atoms or molecules in the constituent of said optical
absorption layer.
Claim 34
Dependent Claim
24 words
The exfoliating method according to any one of
claims 26 to 33, wherein said separation layer comprises an
optical absorption layer comprising amorphous silicon.
Claim 35
Dependent Claim
20 words
The exfoliating method according to claim 34, wherein
said amorphous silicon contains 2 atomic percent or more of
hydrogen (H).
Claim 36
Dependent Claim
19 words
The exfoliating method according to any one of
claims 26 to 33, wherein said separation layer comprises a
ceramic.
Claim 37
Dependent Claim
19 words
The exfoliating method according to any one of
claims 26 to 33, wherein said separation layer comprises a
metal.
Claim 38
Dependent Claim
20 words
The exfoliating method according to any one of
claims 26 to 33, wherein said separation layer comprises an
organic polymer.
Claim 39
Dependent Claim
32 words
The exfoliating method according to claim 38,
wherein said organic polymer has at least one adhere selected
from the group consisting of -CH 2 -, -CO-, -CONH-, -NH-, -COO-,
-N=N-, and -CH=N-.
Claim 40
Independent Claim
84 words
A method for transferring a thin film device on a
substrate onto a transfer member comprising the following
steps of: forming a separation layer on said substrate; forming a transferred layer including said thin film
device onto said separation layer; adhering said transferred layer including said thin film
device to said transfer member with an adhesive layer, irradiating said separation layer with light so as to
cause exfoliation in said separation layer and/or at the
interface; and detaching said substrate from said separation layer.
Claim 41
Independent Claim
171 words
A method for transferring a transferred layer
including a thin film device on a substrate onto a transfer
member comprising: a first step for forming an amorphous silicon layer on
said substrate; a second step for forming said transferred layer
including said thin film device on said amorphous silicon
layer; a third step for adhering said transferred layer
including said thin film device to said transfer member with
an adhesive layer; a fourth step for irradiating said amorphous silicon
layer with light through said substrate so as to cause
exfoliation in said amorphous silicon layer and/or at the
interface and to decrease the adhering force between said
substrate and said transferred layer; and a fifth step for detaching said substrate from said
amorphous silicon layer; wherein said transferred layer formed in said second step
comprises a thin film transistor, and the thickness of said
amorphous silicon layer formed in said first step is smaller
than the thickness of the channel layer of said thin film
transistor formed in said second step.
Claim 42
Independent Claim
133 words
A method for transferring a transferred layer
including a thin film device on a substrate onto a transfer
member comprising: a first step for forming an amorphous silicon layer having
a thickness of 25 nm or less on said substrate; a second step for forming said transferred layer
including said thin film device on said amorphous silicon
layer; a third step for adhering said transferred layer
including said thin film device to said transfer member with
an adhesive layer; a fourth step for irradiating said amorphous silicon
layer with light through said substrate so as to cause
exfoliation in said amorphous silicon layer and/or at the
interface and to decrease the adhering force between said
substrate and said transferred layer; and a fifth step for detaching said substrate from said
amorphous silicon layer.
Claim 43
Dependent Claim
35 words
The method for transferring a transferred layer
including a thin film device according to claim 42, wherein
in said first step, said amorphous silicon layer having a
thickness of 11 nm or less is formed.
Claim 44
Independent Claim
40 words
The method for transferring a transferred layer
including a thin film device according to any one of claims
41 to 43, wherein in said first step, said amorphous silicon
layer is formed by a low pressure chemical vapor deposition
process.
Claim 45
Independent Claim
103 words
A method for transferring a transferred layer
including a thin film device on a substrate onto a transfer
member comprising the following steps of: forming a separation layer onto said substrate; forming a silicon-based optical absorption layer on said
separation layer; forming said transferred layer including said thin film
device on said silicon-based optical absorption layer; adhering said transferred layer including said thin film
device to said transfer member with an adhesive layer; irradiating said separation layer with light through
said substrate so as to cause exfoliation in said separation
layer and/or at the interface; and detaching said substrate from said separation layer.
Claim 46
Dependent Claim
50 words
A method for transferring a transferred layer
including a thin film device according to claim 45, wherein
said separation layer and said optical absorption layer
comprise amorphous silicon, and said method further comprises
a step for providing a silicon-based intervening layer between
said separation layer and said optical absorption layer.
Claim 47
Independent Claim
161 words
A method for transferring a transferred layer
including a thin film device on a substrate onto a transfer
member comprising: a first step for forming a separation layer on said
substrate; a second step for forming said transferred layer
including said thin film device on said separation layer; a third step for adhering said transferred layer
including said thin film device to said transfer member with
an adhesive layer; a fourth step for irradiating said separation layer with
light through said substrate so as to cause exfoliation in
said separation layer and/or at the interface; and a fifth step for detaching said substrate from said
separation layer; wherein, in said fourth step, the stress, acting on upper
layers above said separation layer in the exfoliation in said
separation layer and/or at the interface, is absorbed by the
proof stress of said upper layers above said separation layer
to prevent the deformation and breakage of said upper layers
above said separation layer.
Claim 48
Dependent Claim
49 words
The method for transferring a transferred layer
including a thin film device according to claim 47, wherein
said method further comprises a step for forming a reinforcing
layer for securing said proof stress at any position in said
upper layers above said separation layer, prior to said fourth
step.
Claim 49
Independent Claim
147 words
A method for transferring a transferred layer
including a thin film device on a substrate onto a transfer
member comprising: a first step for forming a separation layer on said
substrate; a second step for forming said transferred layer
including said thin film device on said separation layer; a third step for adhering said transferred layer
including said thin film device to said transfer member with
an adhesive layer; a fourth step for irradiating said separation layer with
light through said substrate so as to cause exfoliation in
said separation layer and/or at the interface; and a fifth step for detaching said substrate from said
separation layer; wherein said fourth step includes sequential scanning
of beams for locally irradiating said separation layer, such
that a region irradiated by the N-th beam (wherein N is an
integer of 1 or more) does not overlap with other irradiated
regions.
Claim 50
Independent Claim
167 words
A method for transferring a transferred layer
including a thin film device on a substrate onto a transfer
member comprising: a first step for forming a separation layer on said
substrate; a second step for forming said transferred layer
including said thin film device on said separation layer; a third step for adhering said transferred layer
including said thin film device to said transfer member with
an adhesive layer; a fourth step for irradiating said separation layer with
light through said substrate so as to cause exfoliation in
said separation layer and/or at the interface; and a fifth step for detaching said substrate from said
separation layer; wherein said fourth step includes sequential scanning
of beams for locally irradiating said separation layer, such
that each beam has a flat peak region having the maximum optical
intensity in the center, and a flat peak region irradiated
by the N-th beam (wherein N is an integer of 1 or more) does
not overlap with other irradiated flat peak regions.
Claim 51
Independent Claim
178 words
A method for transferring a transferred layer
including a thin film device on a substrate onto a transfer
member comprising: a first step for forming a separation layer on said
substrate; a second step for forming said transferred layer
including said thin film device on said separation layer; a third step for adhering said transferred layer
including said thin film device to said transfer member with
an adhesive layer; a fourth step for irradiating said separation layer with
light through said substrate so as to cause exfoliation in
said separation layer and/or at the interface; and a fifth step for detaching said substrate from said
separation layer; wherein said fourth step includes sequential scanning
of beams for locally irradiating said separation layer, such
that each beam has the maximum optical intensity in the central
region, and an effective region irradiated by the N-th beam
(wherein N is an integer of 1 or more) having an intensity,
which is 90% or more of the maximum intensity, does not overlap
with the other effective regions irradiated by other beam
scanning.
Claim 52
Independent Claim
41 words
The method for transferring a transferred layer
including a thin film device according to any one of claims
40 to 51, wherein said substrate is a transparent substrate,
said separation layer is irradiated with said incident light
through said transparent substrate.
Claim 53
Independent Claim
38 words
The method for transferring a transferred layer
including a thin film device according to any one of claims
40 to 51, wherein said method further comprises a step for
removing said separation layer adhered to said transfer
member.
Claim 54
Independent Claim
29 words
The method for transferring a transferred layer
including a thin film device according to any one of claims
40 to 51, wherein said transfer member is a transparent
substrate.
Claim 55
Independent Claim
55 words
The method for transferring a transferred layer
including a thin film device according to any one of claims
40 to 51, wherein when the maximum temperature of said transfer
member during the formation is Tmax, said transfer member
comprises a material having a glass transition point (Tg) or
softening point which is lower than Tmax.
Claim 56
Independent Claim
49 words
The method for transferring a transferred layer
including a thin film device according to any one of claims
40 to 51, wherein the glass transition point (Tg) or softening
point of said transfer member is lower than said maximum
temperature in the process for forming said thin film device.
Claim 57
Independent Claim
33 words
The method for transferring a transferred layer
including a thin film device according to any one of claims
40 to 51, wherein said transfer member comprises a synthetic
resin or a glass material.
Claim 58
Independent Claim
27 words
The method for transferring a transferred layer
including a thin film device according to any one of claims
40 to 51, wherein said substrate has heat resistance.
Claim 59
Independent Claim
39 words
The method for transferring a transferred layer
including a thin film device according to any one of claims
40 to 51, wherein said substrate has a transmittance of 10%
or more for light with a wavelength of 310 nm.
Claim 60
Independent Claim
48 words
The method for transferring a transferred layer
including a thin film device according to any one of claims
40 to 51, wherein when the maximum temperature in the formation
of said transferred layer is Tmax, said substrate comprises
a material having a distortion point of Tmax or more.
Claim 61
Independent Claim
28 words
The method for transferring a transferred layer
including a thin film device according to any one of claims
40 to 51, wherein said separation layer comprises amorphous
silicon.
Claim 62
Dependent Claim
29 words
The method for transferring a transferred layer
including a thin film device according to claim 61, wherein
said amorphous silicon contains 2 atomic percent or more of
hydrogen (H).
Claim 63
Dependent Claim
30 words
The method for transferring a transferred layer
including a thin film device according to claim 62, wherein
said amorphous silicon may contain 10 atomic percent or more
of hydrogen (H).
Claim 64
Independent Claim
28 words
The method for transferring a transferred layer
including a thin film device according to any one of claims
40 to 51, wherein said separation layer comprises silicon
nitride.
Claim 65
Independent Claim
29 words
The method for transferring a transferred layer
including a thin film device according to any one of claims
40 to 51, wherein said separation layer comprises a
hydrogen-containing alloy.
Claim 66
Independent Claim
29 words
The method for transferring a transferred layer
including a thin film device according to any one of claims
40 to 51, wherein said separation layer comprises a
nitrogen-containing alloy.
Claim 67
Independent Claim
29 words
The method for transferring a transferred layer
including a thin film device according to any one of claims
40 to 51, wherein said separation layer comprises a
multi-layered film.
Claim 68
Dependent Claim
31 words
The method for transferring a transferred layer
including a thin film device according to claim 67, wherein
said multi-layered film comprises an amorphous silicon film
and a metallic film formed thereon.
Claim 69
Dependent Claim
36 words
The method for transferring a transferred layer
including a thin film device according to claim 40, wherein
said separation layer comprises at least one material selected
from the group consisting of ceramics, metals, and organic
polymers.
Claim 70
Independent Claim
27 words
The method for transferring a transferred layer
including a thin film device according to any one of claims
40 to 51, wherein said light is laser light.
Claim 71
Dependent Claim
29 words
The method for transferring a transferred layer
including a thin film device according to claim 70, wherein
said laser light has a wavelength of 100 nm to 350 nm.
Claim 72
Dependent Claim
30 words
The method for transferring a transferred layer
including a thin film device according to claim 70, wherein
said laser light may have a wavelength of 350 nm to 1,200 nm.
Claim 73
Independent Claim
31 words
The method for transferring a transferred layer
including a thin film device according to any one of claims
40 to 51, wherein said thin film device is a thin film
transistor.
Claim 74
Dependent Claim
23 words
The thin film device transferred onto said transfer
member by a method for transferring described in any one of
claims 40 to 51.
Claim 75
Dependent Claim
18 words
The thin film device according to claim 74, wherein
said thin film device is a thin film transistor.
Claim 76
Dependent Claim
30 words
A thin film integrated circuit device comprising
a thin film device transferred onto said transfer member by
a method for transferring described in any one of claims 40
to 51.
Claim 77
Dependent Claim
56 words
A liquid crystal display device comprising: a
matrix of thin film transistors, a pixel section comprising
pixel electrodes each connected to one end of each thin film
transistor, and an active matrix substrate produced by
transferring the thin film transistors in said pixel section
by a method described in any one of claims 40 to 51.
References Cited (Backward Citations)
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