EP0837502A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Improvements in or relating to hydrogen gettering
Assignee: Texas Instruments Inc
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Filing: 1997-10-15
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Granted: —
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Expires: 2017-10-15
Abstract
Abstract A method, system and materials for use in hydrogen gettering in conjunction with microelectronic and microwave components that are generally hermetically sealed in an enclosure typically referred to as a "package"- Gettering materials that can be used include titanium with or without a hydrogen permeable coating or covering, alloys of zirconium-vanadium iron and zeolites and several ways to apply these materials to the package. In addition, the hydrogen permeable material can be used over a vent from the interior of the package to the exterior wherein hydrogen will escape from the package interior when the hydrogen concentration within the package is greater than without the package.
Inventors
- 👤 John M. Bedinger
- 👤 Clyde R. Fuller
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-31 01:11
CPC Classifications
C; C01; C01B; C01B3/00; C01B3/0005; C01B3/001; C01B3/0018; C01B3/0026; H; H10; H10P; H10P95/00; H10P95/40; H10P95/408; C01B3/0031; C01B3/50; C01B3/501; H10W; H10W76/00; H10W76/40; H10W76/42; H10W76/48; C01B2203/00; C01B2203/04; C01B2203/0405; C01B2203/0465; C01B2203/0495; Y; Y02; Y02E; Y02E60/00; Y02E60/30; Y02E60/32; Y10; Y10T; Y10T428/00; Y10T428/12; Y10T428/12431; Y10T428/12438; Y10T428/13; Y10T428/131
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
34 words
A device which comprises: a material which is degradable in the presence of hydrogen; a package containing said material; and a layer of a hydrogen getter containing a transition metal
disposted within said package.
Claim 2
Dependent Claim
23 words
The device of Claim 1, wherein said transition metal is taken
from the group consisting of palladium, platinum and nickel and
oxides thereof.
Claim 3
Dependent Claim
17 words
The device of Claim 1 or Claim 2, wherein said material
comprises a group III-V semiconductor composition.
Claim 4
Dependent Claim
14 words
The device of Claim 1 or Claim 2, wherein said material
comprises gallium arsenide.
Claim 5
Independent Claim
24 words
The device of any preceding claim, wherein said package is a
hermetic sealing package hermetically sealing said material and
said getter within said package.
Claim 6
Independent Claim
15 words
The device of any preceding claim, wherein said hydrogen getter
comprises a elemental transition metal.
Claim 7
Independent Claim
53 words
The device of any of Claims 1 to 5 wherein said package
comprises an elemental titanium-containing package having a
substantially oxide-free interior surface arranged for housing said
material therein, said getter comprising a layer of hydrogen
permeable palladium disposed on said oxide-free surface between an
inner surface of said package and said material.
Claim 8
Independent Claim
54 words
A method of making a package containing a substantially
hydrogen-free interior which comprises the steps of: providing a package having a hollow interior region; and forming a layer of a hydrogen getter taken from the class
consisting of elemental titanium, alloys of vanadium, zirconium and
iron having hydrogen gettering properties within said interior
region.
Claim 9
Dependent Claim
35 words
The method of Claim 8, wherein said step of forming said layer
comprises forming an elemental titanium and said method, further
comprises the step of forming a hydrogen-permeable layer of
palladium over said elemental titanium.
Claim 10
Dependent Claim
22 words
The method of Claim 8 or Claim 9 further comprising the step
of disposing a hydrogen degradable material within said hollow
interior.
Claim 11
Dependent Claim
23 words
The method of Claim 10 wherein said step of disposing said
material comprises disposing a material formed from a group III-V
semiconductor compound.
Claim 12
Dependent Claim
22 words
The method of Claim 10 or Claim 11 where said step of
disposing said material comprises disposing a material comprising
gallium arsenide.
Claim 13
Independent Claim
18 words
The method of any of Claims 10 to 12, further comprising
hermetically sealing said material within said package.
Claim 14
Independent Claim
56 words
The method of any of Claims 8 to 13 further comprising
forming said layer of hydrogen getter from a mixture of powders of
a hydrogen gettering material in an organic vehicle taken from the
class consisting of polymeric materials including epoxies,
silicones, acrylics, urethanes, polyimides and benzocyclobutene and
depositing said mixture within said hollow interior region.
Claim 15
Dependent Claim
23 words
The method of Claim 14, further comprising depositing said
mixture by one of screen printing and a numerically controlled
placement and dispensing pump.
Claim 16
Independent Claim
37 words
The method of any of Claims 8 to 15 further comprising forming
a vent through said package from said hollow interior region to the
exterior of said package and forming a hydrogen permeable layer
over said vent.
Claim 17
Independent Claim
24 words
The method of any of Claims 8 to 16, wherein said step of
forming said hydrogen permeable layer comprises forming a layer of
palladium.
Claim 18
Independent Claim
36 words
The method of any of claims 8 to 17 further comprising the
step of placing said package in an environment where the
concentration of hydrogen is less than the concentration of
hydrogen in said hollow region.
Claim 19
Independent Claim
53 words
A method providing hydrogen gettering properties to a device
which method comprising: providing a hydrogen getter material in one of powder or
particulate form; mixing said getter material with a binder capable of attaching
said getter material to a predetermined surface; and adhering the mixture of getter material and binder to said
surface.
Claim 20
Dependent Claim
26 words
The method of Claim 19, wherein said step of adhering
comprises the steps of screen printing said mixture onto a surface
and then curing said mixture.
Claim 21
Dependent Claim
24 words
The method of Claim 19 or Claim 20 further comprising the step
of mixing an RF absorber material with said getter material and
binder.
References Cited (Backward Citations)
No citation records indexed.
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