EP0837494A2
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Method and apparatus for priority based scheduling of wafer processing within a multiple chamber semiconductor wafer processing tool
Assignee: Applied Materials Inc
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Filing: 1997-09-22
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Granted: —
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Expires: 2017-09-22
Abstract
Abstract Apparatus and concomitant method for performing priority based scheduling of wafer processing within a multiple chamber semiconductor wafer processing system (100) (cluster tool). The sequences (136) assigns priority values to the chambers (104,106,108,110) in a cluster tool, then moves wafers from chamber to chamber in accordance with the assigned priorities. The sequencer is capable of determining the amount of time available before a priority move is to be performed and, if time is sufficient, the sequencer performs a non-priority move while waiting. The sequencer also dynamically varies assigned priorities depending upon the availability of chambers in the tool. Lastly, the sequencer prioritizes the chambers based upon the minimum time required for the robot to move the wafers in a particular stage.
Inventors
- 👤 Dusan Jevtic
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-28 18:13
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0451; H10P72/0452; H10P72/0454; G; G05; G05B; G05B19/00; G05B19/02; G05B19/418; G05B19/41865; H10P72/0461; H10P72/0468; H10P72/06; H10P72/0612; H10P72/30; H10P72/33; H10P72/3304; G05B2219/00; G05B2219/30; G05B2219/32; G05B2219/32266; G05B2219/32267; G05B2219/32306; G05B2219/45; G05B2219/45031; Y; Y02; Y02P; Y02P90/00; Y02P90/02; Y10; Y10S; Y10S438/00; Y10S438/907; Y10S438/908
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
63 words
A method for scheduling semiconductor wafers for
processing within a multiple chamber, semiconductor wafer
processing system having a plurality of chambers, said method
comprising: assigning a priority to each chamber in said plurality
of chambers; selecting a chamber having a highest priority; moving a wafer from a selected chamber to a target
chamber in accordance with the assigned priority of the
selected chamber.
Claim 2
Independent Claim
63 words
A method for scheduling semiconductor wafers for
processing within a multiple chamber, semiconductor wafer
processing system having a plurality of chambers, said method
comprising: assigning a priority to each chamber in said plurality
of chambers; selecting a chamber having a highest priority; moving a wafer from a selected chamber to a target
chamber in accordance with the assigned priority of the
selected chamber.
Claim 3
Dependent Claim
37 words
The method of claim 1 wherein, if a plurality of chambers
have the highest priority, the selecting step further
comprises the step of selecting a chamber having a highest
priority and having a shortest remaining process time.
Claim 4
Dependent Claim
92 words
The method of claim 1 further comprising the steps of: determining a time to complete (T remains ) processing for
the selected chamber; computing a time to perform (T meanwhile ) a wafer move for at
least one other chamber; dividing T meanwhile by T remains to produce a quotient; comparing the quotient to a threshold value; if the quotient is less than the threshold value, then
move the wafer in the selected chamber; and if the quotient is greater than the threshold value,
then move a wafer in the other chamber.
Claim 5
Dependent Claim
24 words
The method of claim 1 further comprising the step of
dynamically assigning priority to each chamber in response to
processing times for each chamber.
Claim 6
Dependent Claim
17 words
The method of claim 4 further comprising the step of
recalculating said priority after moving a wafer.
Claim 7
Dependent Claim
24 words
The method of claim 3 further comprising the step of
dynamically assigning priority to each chamber in response to
processing times for each chamber.
Claim 8
Dependent Claim
17 words
The method of claim 6 further comprising the step of
recalculating said priority after moving a wafer.
Claim 9
Dependent Claim
49 words
The method of claim 1 wherein said assigning step further
comprises assigning a highest priority to a chamber with a
shortest time until a wafer therein is to be moved and a
lowest priority to a chamber with a longest time until a
wafer therein is to be moved.
Claim 10
Dependent Claim
77 words
Apparatus for scheduling semiconductor wafers for
processing within a multiple chamber, semiconductor wafer
processing system having a plurality of chambers, said
apparatus comprising: a sequencer for assigning a priority to each chamber in
said plurality of chambers and for selecting a chamber having
a highest priority; and a wafer transfer robot, coupled to said sequencer, for
moving a wafer from a selected chamber to a target chamber in
accordance with the assigned priority of the selected
chamber.
Claim 11
Dependent Claim
77 words
Apparatus for scheduling semiconductor wafers for
processing within a multiple chamber, semiconductor wafer
processing system having a plurality of chambers, said
apparatus comprising: a sequencer for assigning a priority to each chamber in
said plurality of chambers and for selecting a chamber having
a highest priority; and a wafer transfer robot, coupled to said sequencer, for
moving a wafer from a selected chamber to a target chamber in
accordance with the assigned priority of the selected
chamber.
Claim 12
Dependent Claim
31 words
The apparatus of claim 10 wherein, if a plurality of
chambers have the highest priority, the sequencer selects a
chamber having a highest priority and having a shortest
remaining process time.
Claim 13
Dependent Claim
109 words
The apparatus of claim 10 wherein the sequencer further
comprises: means for determining a time to complete (T remains )
processing for the selected chamber; means for computing a time to perform (T meanwhile ) a wafer
move for at least one other chamber; means for dividing T meanwhile by T remains to produce a
quotient; means for comparing the quotient to a threshold value; where, if the quotient is less than the threshold value,
then the wafer transfer robot moves the wafer in the selected
chamber; and if the quotient is greater than the threshold value,
then the wafer transfer robot moves a wafer in the other
chamber.
Claim 14
Dependent Claim
26 words
The apparatus of claim 10 wherein the sequencer further
comprises means for dynamically assigning priority to each
chamber in response to processing times for each chamber.
Claim 15
Dependent Claim
19 words
The apparatus of claim 13 wherein the sequencer further
comprises means for recalculating said priority after moving
a wafer.
Claim 16
Dependent Claim
26 words
The apparatus of claim 12 wherein the sequencer further
comprises means for dynamically assigning priority to each
chamber in response to processing times for each chamber.
Claim 17
Dependent Claim
19 words
The apparatus of claim 15 wherein the sequencer further
comprises means for recalculating said priority after moving
a wafer.
Claim 18
Dependent Claim
49 words
The apparatus of claim 10 wherein said sequencer further
comprises means for assigning a highest priority to a chamber
with a shortest time until wafer therein is to be moved and a
lowest priority to a chamber with a longest time until a
wafer therein is to be moved.
Claim 19
Dependent Claim
45 words
A data structure stored in a computer memory, where said
data structure is used by a sequencer to define a trajectory
of one or more wafers through a cluster tool, comprising at
least one field defining a priority of a chamber within said
cluster tool.
Claim 20
Dependent Claim
45 words
A data structure stored in a computer memory, where said
data structure is used by a sequencer to define a trajectory
of one or more wafers through a cluster tool, comprising at
least one field defining a priority of a chamber within said
cluster tool.
Claim 21
Dependent Claim
18 words
The data structure of claim 18 further comprising a
plurality of fields defining each stage of a trajectory.
References Cited (Backward Citations)
No citation records indexed.
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