EP0813255A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Method of fabricating composite piezo-electric members and a mask used for the fabrication of the same
Assignee: GE Healthcare Japan Corp
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Filing: 1997-06-10
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Granted: —
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Expires: 2017-06-10
Abstract
Abstract Composite piezo-electric members having an intended structure are fabricated based on the LIGA process which includes the exposure of synchrotron radiation X-rays, development and lithography. With the intention of reducing the cost of the X-ray exposure mask, it is made of wire gauze having a regular pattern and formed by electrocasting.
Inventors
- 👤 Yasuhito Takeuchi
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 20:32
CPC Classifications
B; B06; B06B; B06B1/00; B06B1/02; B06B1/06; B06B1/0607; H; H10; H10N; H10N30/00; H10N30/01; H10N30/08; H10N30/082; H10N30/09; H10N30/092; Y; Y10; Y10T; Y10T29/00; Y10T29/42
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
31 words
A method of fabricating composite piezo-electric members based on an exposure of synchrotron radiation X-rays, development and lithography, wherein a mask used for said X-ray exposure is made of wire gauze.
Claim 2
Dependent Claim
33 words
A mask used for a fabrication of composite piezo-electric members based on an exposure of synchrotron radiation X-rays, development and lithography, wherein said mask of said X-ray exposure is made of wire gauze.
Claim 3
Dependent Claim
28 words
The mask of claim 2 wherein said wire gauze has a mesh intended for a fabrication of 3-1 bonding composite piezo-electric members or 1-3 bonding composite piezo-electric members.
Claim 4
Dependent Claim
15 words
The mask of claim 2 or 3 wherein said wire gauze is formed by electrocasting.
References Cited (Backward Citations)
US4683396A
Cited
EP0462311A1
Cited
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