Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
37 words
An integrated circuit inductor structure comprising a resistive substrate (20); a spiral inductor (12); a conductive layer (32) located between the spiral inductor and the substrate; and means for insulating the spiral inductor from the conductive layer.
Claim 2
Dependent Claim
30 words
An inductor structure as recited in claim 1, wherein the conductive layer (32) includes a plurality of conductive segments and located to minimize eddy currents flowing through the conductive layer.
Claim 3
Dependent Claim
61 words
An inductor structure as recited in claim 2, wherein the conductive layer additionally includes a perimeter region electrically connected to a fixed low impedance reference voltage, the conductive segments extending from the perimeter region towards a center portion of the planar inductor structure so that electric field current induced in the conductive layer flows a minimized distance through the conductive layer.
Claim 4
Dependent Claim
23 words
An inductor structure as recited in any preceding claim, wherein the conductive layer comprises metal, polysilicon or a heavily-doped region of the substrate.
Claim 5
Dependent Claim
42 words
An inductor structure as recited in any preceding claim, wherein the spiral inductor comprises a first part on a first metallisation layer and a second part on a second metallisation layer wherein the first part and the second part are electrically connected.
Claim 6
Dependent Claim
20 words
An inductor structure as recited in claim 5, wherein the first part and the second part are connected in parallel.
Claim 7
Dependent Claim
20 words
An inductor structure as recited in claim 5, wherein the first part and the second part are connected in series.
Claim 8
Independent Claim
53 words
A method of increasing the Q of an integrated circuit inductor structure, comprising the steps of providing an integrated structure including a substrate (20), a spiral inductor (12) and an insulating layer (18) between the substrate and the spiral inductor; and interposing a conductive layer (32) between the substrate and the insulating layer.
Claim 9
Dependent Claim
14 words
A method as in claim 8, comprising a step of segmenting the conductive layer.
Claim 10
Dependent Claim
47 words
A method as in claim 9, comprising the steps of providing a fixed low impedance potential electrically connected to a perimeter region of the conductive layer; and extending the segmenting of the conductive layer from the perimeter region towards a center portion of the planar inductor structure.