EP0770862A1
Expired / Lapsed
EP
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Temperature sensor element, temperature sensor having the same and method for producing the same temperature sensor element
Assignee: Panasonic Corp
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Filing: 1996-05-10
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Granted: —
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Expires: 2016-05-10
Abstract
Abstract A temperature sensor element for measuring the temperature of exhaust gas from car engines comprises a metallic support having a shape of a flat board, a first electric-insulating film existing on the support, a first temperature sensitive film existing on the first electric-insulating film and having a pair of electrodes, and a second electric-insulating film existing on the temperature sensitive film. The element is superior in thermal shock resistance. The element needs no heat-resistant cap. The element is superior in heat-response since the element has a small heat capacity.
Inventors
- 👤 Hideo Torii
- 👤 Takeshi Room 105 Ru. share gakuenmae KAMADA
- 👤 Atsushi Tomozawa
- 👤 Eiji Room 910 Furoresutamio yamadaikekoen FUJII
- 👤 Ryoichi Takayama
- 👤 Hiroki Room C306 MORIWAKE
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 03:05
CPC Classifications
G; G01; G01K; G01K7/00; G01K7/16; G01K7/22; G01K7/223; H; H01; H01C; H01C7/00; H01C7/02; H01C7/022; H01C7/023
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
51 words
A temperature sensor element comprising a metallic support having a shape of a flat board, a first electric-insulating film provided on the support, a first temperature sensitive film provided on the first electric-insulating film and having a pair of electrodes, and a second electric-insulating film provided on the temperature sensitive film.
Claim 2
Dependent Claim
27 words
The temperature sensor element according to claim 1, wherein a second temperature sensitive film is provided between the first temperature sensitive film and the second electric-insulating film.
Claim 3
Dependent Claim
55 words
The temperature sensor element according to claim 1, wherein one of the pair of electrodes is a first electrode film provided on an upper surface of the first temperature sensitive film and the other of the pair of electrodes is a second electrode film provided on a bottom surface of the first temperature sensitive film.
Claim 4
Dependent Claim
25 words
The temperature sensor element according to any one of claims 1, 2 and 3, wherein a metallic cover is provided on the second electric-insulating film.
Claim 5
Dependent Claim
26 words
The temperature sensor element according to claim 4, wherein the metallic cover is unremovably connected with the metallic support having a shape of a flat board.
Claim 6
Dependent Claim
30 words
The temperature sensor element according to any one of claims 1 through 5, wherein the first temperature sensitive film comprises an oxide including Al, Cr and Fe as main components.
Claim 7
Dependent Claim
33 words
The temperature sensor element according to claim 6, wherein the oxide has a component represented by (Al 1-x-y , Cr x , Fe y ) 2 O z wherein 0.05≦x+y≦0.95, 0.05≦y/(x+y)≦0.6 and 8/3≦z≦3.
Claim 8
Dependent Claim
30 words
The temperature sensor element according to any one of claims 1 through 5, wherein the first temperature sensitive film comprises an oxide of corundum crystal structure or spinel crystal structure.
Claim 9
Dependent Claim
29 words
The temperature sensor element according to any one of claims 1 through 5, wherein the metallic support comprises a heat-resistant alloy including Fe, Cr and Al as main components.
Claim 10
Dependent Claim
26 words
The temperature sensor element according to any one of claims 1 through 5, wherein the electrodes consist of a thin film of a precious metallic alloy.
Claim 11
Dependent Claim
39 words
The temperature sensor element according to claim 1, wherein the first temperature sensitive film shows at least one response property selected from the group consisting of linear type, nonlinear type, negative type and positive type with respect to temperature.
Claim 12
Dependent Claim
141 words
A temperature sensor comprising a metallic flange to fix a substance of which temperature is to be measured on the temperature sensor, a metallic housing connected with the metallic flange, a temperature sensor element connectedly fixed on the metallic housing, a lead to take out a signal, connected with the temperature sensor element, and an electric insulator to electrically insulate the metallic housing from the lead, provided on the lead, wherein the temperature sensor element comprises a metallic support having a shape of a flat board, a first electric-insulating film provided on the support, a first temperature sensitive film provided on the first electric-insulating film and having a pair of electrodes, and a second electric-insulating film provided on the temperature sensitive film, and wherein the lead to take out a signal is connected with each of the pair of the electrodes.
Claim 13
Dependent Claim
31 words
The temperature sensor according to claim 12, wherein the temperature sensor element comprises a second temperature sensitive film existing between the first temperature sensitive film and the second second electric-insulating film.
Claim 14
Dependent Claim
59 words
The temperature sensor according to claim 12, wherein, in the temperature sensor element, one of the pair of electrodes is a first electrode film provided on an upper surface of the first temperature sensitive film and the other of the pair of electrodes is a second electrode film provided on a bottom surface of the first temperature sensitive film.
Claim 15
Dependent Claim
22 words
The temperature sensor according to claim 12, wherein the temperature sensor element comprises a metallic cover provided on the second electric-insulating film.
Claim 16
Independent Claim
95 words
A method for producing a temperature sensor element comprising the steps of forming a first electric-insulating film on a surface of a metallic support having a shape of a flat board, forming a first temperature sensitive film on the first electric-insulating film, forming a pair of electrode films facing each other on a surface of the temperature sensitive film, and forming a second electric-insulating film on one part of a surface of the pair of electrode films with another part of the surface of the pair of electrode films uncovered by the second electric-insulating film.
Claim 17
Dependent Claim
69 words
The method according to claim 16, further comprising the steps of forming a second temperature sensitive film on one part of a surface of the pair of electrode films with another part of the surface of the pair of electrode films uncovered by the second temperature sensitive film before forming the second electric-insulating film, and forming the second electric-insulating film on a surface of the second temperature sensitive film.
Claim 18
Dependent Claim
133 words
The method according to claim 16, further comprising the steps of forming one of the pair of electrode films on the first electric-insulating film before forming the first temperature sensitive film, forming the first temperature sensitive film on one part of a surface of the one of the pair of electrode films with another part of the surface of the one of the pair of electrode films being uncovered by the first temperature sensitive film, forming the other of the pair of electrode films on the first temperature sensitive film, and forming the second electric-insulating film on one part of a surface of the other of the pair of electrode films with another part of the surface of the other of the pair of electrode films being uncovered by the second electric-insulating film.
Claim 19
Independent Claim
48 words
The method according to any one of claims 16, 17 and 18, further comprising the steps of placing a metallic cover on the second electric-insulating film after forming the second electric-insulating film, and connecting the metallic cover with the metallic support of a flat board shape by welding.
Claim 20
Dependent Claim
38 words
A temperature sensor element comprising a metallic tube support, a temperature sensitive film on any one surface of an inner wall and outer wall of the metallic tube support, and an electrode film on the temperature sensitive film.
Claim 21
Dependent Claim
38 words
The temperature sensor element according to claim 20, wherein the temperature sensitive film shows at least one response property selected from the group consisting of linear type, nonlinear type, negative type and positive type with respect to temperature.
Claim 22
Dependent Claim
37 words
The temperature sensor element according to claim 20, wherein the electrode film comprises at least one material selected from the group consisting of a heat-resistant metal, a precious metal, a precious metallic alloy and an electroconductive compound.
Claim 23
Dependent Claim
136 words
A temperature sensor comprising a temperature sensor element comprising a metallic tube support, a temperature sensitive film on any one surface of an inner wall and outer wall of the metallic tube support, and an electrode film on the temperature sensitive film, a lead (A) on the metallic tube support or the electrode film, an electric-insulator (A) provided on an outer face of the lead (A), a metallic housing provided outside the electric-insulator and having a lead, an electric-insulator (B) provided at the other end of the metallic housing where the temperature sensor is not provided, a metallic flange in contact with the electric-insulator (B), and an electric-insulator (C) provided on outer face of the leads (A) and (B) and to electrically insulate the metallic flange, leads (A) and (B) and metallic housing from each other.
Claim 24
Dependent Claim
37 words
The temperature sensor according to claim 23, wherein the temperature sensitive film shows at least one response property selected from the group consisting of linear type, nonlinear type, negative type and positive type with respect to temperature.
Claim 25
Dependent Claim
36 words
The temperature sensor according to claim 23, wherein the electrode film comprises at least one material selected from the group consisting of a heat-resistant metal, a precious metal, a precious metallic alloy and an electroconductive compound.
Claim 26
Independent Claim
51 words
A method for producing a temperature sensor element comprising the steps of forming a temperature sensitive film on any one surface of an inner wall and outer wall of a metallic tube support, forming an electrode film on the temperature sensitive film, and polishing both ends of the metallic tube support.
Claim 27
Dependent Claim
63 words
The method according to claim 26, wherein the metallic tube support is sufficiently long, the method further comprises forming a temperature sensitive film on any one surface of inner wall and outer wall of the metallic tube support, forming an electrode film on the temperature sensitive film to form a sufficiently long sensor element, and cutting the long temperature sensor element into pieces.
Claim 28
Independent Claim
112 words
A method for producing a temperature sensor element comprising the steps of forming a first electric-insulating film on a surface of a substrate, forming a film of oxide including Al, Cr and Fe as main components on the first electric-insulating film by a vacuum gas phase film formation, heat treating the film to form a temperature sensitive film, forming a pair of electrode films facing each other on a surface of the temperature sensitive film, and forming a second electric-insulating film on one part of a surface of the pair of electrode films with another part of the surface of the pair of electrode films being uncovered by the second electric-insulating film.
Claim 29
Dependent Claim
42 words
The method according to claim 28, wherein the vacuum gas phase film formation is a method selected from the group consisting of plasma CVD method, thermal CVD method, reactive deposition method, RF sputtering method, reactive sputtering method and facing targets sputtering method.
Claim 30
Dependent Claim
31 words
The method according to claim 28, wherein the oxide has a component represented by (Al 1-x-y , Cr x , Fe y ) 2 O z wherein 0.05≦x+y≦0.95, 0.05≦y/(x+y)≦0.6 and 8/3≦z≦3.
Claim 31
Dependent Claim
35 words
The method according to claim 28, wherein the temperature sensitive film comprises an oxide including Al, Cr and Fe as main ingredients, and the oxide has a crystal structure of corundum crystal or spinel crystal.
Claim 32
Dependent Claim
17 words
The method according to claim 28, wherein the film of oxide is formed at 200 to 800°C.
Claim 33
Dependent Claim
18 words
The method according to claim 28, wherein the film of oxide is heat treated at 900 to 1300°C.
Claim 34
Dependent Claim
18 words
The method according to claim 28, wherein the film of oxide is heat treated in an oxidizing atmosphere.
References Cited (Backward Citations)
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