Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
133 words
An axial-flow particle sensor comprising: a sensor element comprising a vibrating portion having a sufficient mass for responding to the collision of a solid particle in a fluid and a converter for detecting the vibration of said vibrating portion and converting the vibration to electric signals; a housing for fixing said sensor element; an inlet of fluid; and an outlet of fluid; wherein said outlet is located in the opposite side of said inlet relative to said sensor element, a throughhole is opened in at least a part of the circumference of said vibrating portion, and said vibrating portion of said sensor element is located at the extension of fluid flow formed at said inlet so that the fluid entering from said inlet flows through said throughhole and flows out from said outlet.
Claim 2
Dependent Claim
34 words
An axial-flow particle sensor according to claim 1 wherein said inlet is placed coaxially with said outlet, and said vibrating portion of said sensor element is placed coaxially with said inlet and said outlet.
Claim 3
Dependent Claim
40 words
An axial-flow particle sensor according to claim 2 wherein said vibrating portion has a plate-like form, and the extending direction of the plate of said vibrating portion is almost perpendicular to the direction of fluid flow formed at said inlet.
Claim 4
Dependent Claim
25 words
An axial-flow particle sensor according to any one of claims 1, 2 or 3 wherein two or more throughholes are formed symmetrically with said axis.
Claim 5
Dependent Claim
42 words
An axial-flow particle sensor according to any one of claims 1, 2, 3 or 4 wherein said sensor element has a ceramic substrate, said vibrating portion is a part of said ceramic substrate, and said throughhole is formed on said ceramic substrate.
Claim 6
Dependent Claim
46 words
An axial-flow particle sensor according to any one of claims 1, 2, 3 or 4 wherein said sensor element has a ceramic substrate, said vibrating portion is a part of said ceramic substrate, and said throughhole is a gap between said ceramic substrate and said housing.
Claim 7
Dependent Claim
27 words
An axial-flow particle sensor according to any one of claims 1 to 6 wherein said converter is placed on said inlet side relative to said vibrating portion.
Claim 8
Dependent Claim
27 words
An axial-flow particle sensor according to any one of claims 1 to 6 wherein said converter is placed on said outlet side relative to said vibrating portion.
Claim 9
Dependent Claim
27 words
An axial-flow particle sensor according to any one of claims 1-8 wherein the sectional area of said inlet is smaller than the sectional area of said outlet.
Claim 10
Dependent Claim
85 words
An axial-flow particle sensor according to any one of claims 1-9 wherein said converter is one selected from the group consisting of: that utilizing piezoelectricity, that utilizing electromagnetic induction, that utilizing change in static capacitance, that emitting light on to said vibration portion and utilizing change in incident light at the light receiving portion, that utilizing change in electric resistance due to the strain of the conductor, and that utilizing change in electric resistance due to the strain of the semiconductor, or a combination thereof.
Claim 11
Dependent Claim
92 words
An axial-flow particle sensor according to any one of claims 1-10 wherein said sensor element comprises: a detecting portion having a piezoelectric film consisting of a ceramic material, a first electrode covering at least a part of the outer surface of said piezoelectric film, and a second electrode covering at least a part of the inner surface of said piezoelectric film, a vibrating portion carrying said detecting portion and consisting of a ceramic material, and a fixing portion for fixing said vibrating portion so as to allow said vibrating portion to vibrate.