Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
138 words
An acceleration sensor comprising: an open frame; a mass portion which is displaced in response to an acceleration, with a periphery thereof supported on said frame by means of support beams having a resilient restoring force; a first planar coil disposed on a surface normal to the displacement direction of said mass portion; and a second planar coil disposed facing said first planar coil with a space therebetween; and having a sensor section with a transformer made up of said first planar coil and said second planar coil; the construction being such that under conditions wherein an alternating current signal is applied to said first planar coil, an electrical signal proportional to a change in said space between said first planar coil and said second planar coil corresponding to acceleration is taken out from said second planar coil.
Claim 2
Dependent Claim
30 words
An acceleration sensor according to claim 1, wherein said mass portion is supported on said frame at four locations on central mutually perpendicular axes by means of said support beams.
Claim 3
Dependent Claim
15 words
An acceleration sensor according to claim 1, wherein said sensor section comprises a semiconductor substrate.
Claim 4
Dependent Claim
43 words
An acceleration sensor according to claim 1 comprising; an oscillator for applying an alternating current signal to said first planar coil of said sensor section, and an electronic circuit for computing acceleration based on an electrical signal output from said second planar coil.
Claim 5
Dependent Claim
59 words
An acceleration sensor according to claim 4, wherein said electronic circuit comprises: a rectifying circuit for rectifying the alternating current electrical signal output from said second planar coil; an analog-digital converter for converting the rectified output from said rectifying circuit into a digital signal; and a microcomputer for computing acceleration based on the digital output from said analog-digital converter.
Claim 6
Dependent Claim
17 words
An acceleration sensor according to claim 5, wherein said rectifying circuit is a voltage doubler rectifying circuit.
Claim 7
Dependent Claim
20 words
An acceleration sensor according to claim 1, wherein said sensor section is disposed on each of two mutually perpendicular faces.
Claim 8
Dependent Claim
20 words
An acceleration sensor according to claim 1, wherein said sensor section is disposed on each of three mutually perpendicular faces.
Claim 9
Dependent Claim
29 words
An acceleration sensor according to claim 1, wherein said sensor section incorporates magnetic bodies respectively provided in the vicinity of said first planar coil and said second planar coil.
Claim 10
Dependent Claim
20 words
An acceleration sensor according to claim 9, wherein said magnetic bodies are formed as sheets laid onto the sensor section.