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EP0720229A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Double density fuse bank for the laser break-link programming of an integrated circuit

Assignee: Infineon Technologies AG
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Filing: 1995-11-03
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Granted: —
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Expires: 2015-11-03
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Abstract

Abstract A fuse bank for use in the laser break-link programming of an integrated circuit device. The fuse bank uses fuse elements with two ends that contain fusible regions proximate the first end and non-fusible regions proximate the second end. The fuse elements are aligned in alternately oriented parallel rows so that the first end of each fuse element is juxtaposed with the second end of any adjacent fuse element. By sequentially alternating the orientation of the fuse elements in the fuse bank, the fuse elements can be formed in a highly dense matter without bringing any two fusible regions too close to one another. Accordingly, a laser can be used to sever selected fusible regions without adversely effecting other fusible regions within the fuse bank. By alternating the orientations of sequential fuse elements, a fuse bank can be created that is twice as dense as single orientation fuse banks with only a 30% to 50% increase in size. The space savings on an integrated circuit enables more circuitry per unit space and promotes the further miniaturization of the integrated circuit device.

Inventors

  • 👤 Karl-Heinz Froehner

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-06 11:05
CPC Classifications
H; H10; H10W; H10W42/00; H10W42/80; H10W20/00; H10W20/40; H10W20/49; H10W20/493; H10W20/494

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 101 words
A fuse bank for use in the laser programming of an integrated circuit, comprising: a plurality of fusible elements each having a first end and a second end wherein each fusible element includes a fusible region, proximate said first end, capable of being severed by a predetermined exposure of laser radiation and, a non-fusible region, proximate said first end, incapable of being severed by said predetermined exposure to laser radiation; wherein said fusible elements are alternately aligned in substantially parallel rows so that the first end of each fusible element is juxtaposed with the second end of an adjacent fusible element.
Claim 2
Dependent Claim 21 words
The fuse bank according to Claim 1, wherein the parallel rows of fusible elements are disposed between 2.2µM and 2.7µM apart.
Claim 3
Dependent Claim 20 words
The fuse bank according to Claim 1, wherein said fusible region includes a target area adapted to absorb laser radiation.
Claim 4
Dependent Claim 21 words
The fuse bank according to Claim 1, wherein each said fusible region is separated by a distance of at least 4.5µM.
Claim 5
Dependent Claim 25 words
The fuse bank according to Claim 1, wherein said nonfusible region includes a metal that is substantially reflective to said predetermined exposure of laser radiation.
Claim 6
Dependent Claim 96 words
A fuse element for use in laser break-link programming of an integrated circuit device, wherein a predetermined exposure of laser radiation is used to sever selected fuse elements, said fuse element comprising: a first conductive region capable of being severed by said predetermined exposure of laser radiation; and a second conductive region, coupled to said first conductive region, incapable of being severed by said predetermined exposure of laser radiation, whereby when said fuse element is exposed to said predetermined exposure of laser radiation, said first conductor region is severed and said second conductive region remains intact.
Claim 7
Dependent Claim 21 words
The fuse element according to Claim 6, wherein said first conductive region includes a target area adapted to absorb laser radiation.
Claim 8
Dependent Claim 26 words
The fuse element according to Claim 6, wherein said second conductive region includes a metal that is substantially reflective to said predetermined exposure of laser radiation.
Claim 9
Dependent Claim 20 words
The fuse element according to Claim 6, wherein said first conductive region and said second conductive region are linearly aligned.
Claim 10
Independent Claim 78 words
A method of manufacturing a fuse bank comprising the steps of: forming a plurality of fusible elements each having a first end and a second end, wherein each fusible element includes a fusible region, proximate said first end, and a non-fusible region, proximate said second end; wherein said plurality of fusible elements are formed in substantially parallel rows so that the first end of each fusible element is juxtaposed to the second end of an adjacent fusible element.
Claim 11
Dependent Claim 25 words
The method according to Claim 10, further including the step of providing a target area on each said fusible region adapted to absorb laser radiation.
Claim 12
Dependent Claim 18 words
The method according to Claim 10, wherein said non-fusible region includes a metal substantially reflective to laser radiation.
Claim 13
Dependent Claim 18 words
The method according to Claim 10, wherein each of the substantially parallel rows are less than 2.7µM apart.
Claim 14
Dependent Claim 19 words
The method according to Claim 11, wherein each target area is separated by a distance of at least 4.5µM.

References Cited (Backward Citations)

US4935801A Cited
US4910418A Cited
US5025300A Cited
US5185291A Cited

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