EP0712121A2
Expired / Lapsed
EP
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Galvanomirror and optical disk drive using the same
Assignee: Toshiba Corp
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Filing: 1995-11-10
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Granted: —
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Expires: 2015-11-10
Abstract
Abstract A galvanomirror (9) includes a rocking member (25) provided with a reflector (24). The rocking member (25) is constituted of a semiconductor such as silicon, and connected to a hollow portion of a first plate (21) through two elastic members (26). Second and third plates (22, 23) are insulatively bonded onto both sides of the first plate (21). Four electrodes (28-31) are symmetrically provided on those portions of the second and third plates (22, 23) that correspond to the rocking member (25). In this constitution, if the rocking member (25) is charged positively (negatively), the electrodes (29, 30) are charged negatively (positively), and the electrodes (28, 31) are charged positively (negatively), the rocking member (25) is rotated (rocked) while the elastic members (26) are twistedly deformed.
Inventors
- 👤 Akihiro C/O Intellectual Property Div. Kasahara
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-03 11:28
CPC Classifications
G; G11; G11B; G11B7/00; G11B7/12; G11B7/135; G11B7/1362; G11B7/08; G11B7/085; G02; G02B; G02B26/00; G02B26/08; G02B26/0816; G02B26/0833; G02B26/0841; G02B7/00; G02B7/18; G02B7/182; G02B7/1821; G11B7/08547; G11B7/08564; G11B7/09; G11B7/0901; G11B7/0903; G11B7/094
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
57 words
A galvanomirror characterized by comprising: a chargeable rocking member (25) with a reflector (24); a supporting member (26) for supporting said rocking member (25) to allow said rocking member (25) to be rocked; and chargeable electrodes (28-31) for moving said rocking member (25) by electrostatic force such that said reflector (24) reflects light at a desired angle.
Claim 2
Dependent Claim
25 words
The galvanomirror according to claim 1, characterized in that said reflector (24) of said rocking member (25) is formed by mirror-finishing said rocking member (25).
Claim 3
Dependent Claim
18 words
The galvanomirror according to claim 2, characterized in that said rocking member (25) is formed of semiconductor material.
Claim 4
Dependent Claim
14 words
The galvanomirror according to claim 3, characterized in that said semiconductor material includes silicon.
Claim 5
Dependent Claim
20 words
The galvanomirror according to claim 2, characterized in that said rocking member (25) includes material having an anisotropic crystal structure.
Claim 6
Dependent Claim
27 words
The galvanomirror according to claim 1, characterized in that said rocking member (25) and said supporting member (26) are formed integrally as one component by same material.
Claim 7
Dependent Claim
23 words
The galvanomirror according to claim 6, characterized in that said rocking member (25) and said supporting member (26) are formed of semiconductor material.
Claim 8
Dependent Claim
14 words
The galvanomirror according to claim 7, characterized in that said semiconductor material includes silicon.
Claim 9
Dependent Claim
19 words
The galvanomirror according to claim 6, characterized in that said supporting member (26) rotatably supports said rocking member (25).
Claim 10
Dependent Claim
19 words
The galvanomirror according to claim 9, characterized in that said supporting member (26) is constituted of an elastic member.
Claim 11
Dependent Claim
24 words
The galvanomirror according to claim 1, characterized by further comprising a sensor for sensing capacitance between said rocking member (25) and said electrodes (28-31).
Claim 12
Dependent Claim
31 words
The galvanomirror according to claim 11, characterized by further comprising a circuit for correcting an amount of rocking of said rocking member (25) based on the capacitance sensed by said sensor.
Claim 13
Dependent Claim
116 words
A galvanomirror characterized by comprising: a first plate (21) having a hollow portion; a chargeable rocking member (25) located in the hollow portion of said first plate (21) and having a reflector (24); a supporting member (26) fixed onto said first plate (21), for supporting said rocking member (25) to allow said rocking member (25) to be rocked; second and third plates (22, 23) opposed to each other, said first plate (21) being interposed therebetween; and chargeable electrodes (28-31) provided on said second and third plates (22, 23) at positions corresponding to said rocking member (25), for moving said rocking member (25) by electrostatic force such that said reflector (24) reflects light at a desired angle.
Claim 14
Dependent Claim
21 words
The galvanomirror according to claim 13, characterized in that said galvanomirror is sealed with said first, second and third plates (21-31).
Claim 15
Dependent Claim
30 words
The galvanomirror according to claim 13, characterized in that said rocking member (25), said supporting member (26)and said first plate (21) are formed integrally as one component by same material.
Claim 16
Dependent Claim
27 words
The galvanomirror according to claim 15, characterized in that said rocking member (25), said supporting member (26) and said first plate (21) are formed by semiconductor material.
Claim 17
Dependent Claim
14 words
The galvanomirror according to claim 16, characterized in that said semiconductor material includes silicon.
Claim 18
Dependent Claim
114 words
An optical disk drive comprising an optical head (7) loaded with a light source (3) for emitting a laser beam, a galvanomirror (9) for reflecting the laser beam emitted from said light source (3), and an objective lens (10) for focusing the laser beam reflected by said galvanomirror (9) upon an optical disk, characterized in that said galvanomirror (9) comprises: a chargeable rocking member (25) with a reflector (24); a supporting member (26) for supporting said rocking member (25) to allow said rocking member (25) to be rocked; and chargeable electrodes (28-31) for moving said rocking member (25) by electrostatic force such that said reflector (24) reflects the laser beam at a desired angle.
Claim 19
Dependent Claim
173 words
An optical disk drive comprising an optical head (7) loaded with a light source (3) for emitting a laser beam, a galvanomirror (9) for reflecting the laser beam emitted from said light source (3), and an objective lens (10) for focusing the laser beam reflected by said galvanomirror (9) upon an optical disk, characterized in that said galvanomirror (9) comprises: a first plate (21) having a hollow portion; a chargeable rocking member (25) located in the hollow portion of said first plate (21) and having a reflector (24); a supporting member (26) fixed onto said first plate (21), for supporting said rocking member (25) to allow said rocking member (25) to be rocked; second and third plates (22, 23) opposed to each other, said first plate (21) being interposed therebetween; and chargeable electrodes (28-31) provided on said second and third plates (22, 23) at positions corresponding to said rocking member (25), for moving said rocking member (25) by electrostatic force such that said reflector (24) reflects the laser beam at a desired angle.
References Cited (Backward Citations)
No citation records indexed.
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