EP0699913A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Interface apparatus for automatic test equipment
Assignee: Teradyne Inc
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Filing: 1995-09-01
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Granted: —
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Expires: 2015-09-01
Abstract
Abstract An interface between a test head portion (202) of automatic test equipment and a handling device such as a prober (204). The interface employs preloaded kinematic couplings (270, 280) between the test head and the handling device and between the probe card (228) and the test head. These couplings allow the probe card to be repeatedly positioned relative to the component in the handling device. They also reduce forces on the probe card to prevent distortion of the probe card. The interface provides separate mechanical and electrical loops such that mechanical precision is not dependant on the electrical structure.
Inventors
- 👤 Alexander H. Slocum
- 👤 Michael A. Chiu
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-08 06:52
CPC Classifications
H; H10; H10P; H10P74/00; G; G01; G01R; G01R1/00; G01R1/30; G01R1/02; G01R1/04; G01R1/06; G01R1/067; G01R1/06705; G01R1/073; G01R31/00; G01R31/28; G01R31/2851; G01R31/2886; G01R31/2887; Y; Y10; Y10T; Y10T403/00; Y10T403/32
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
32 words
In an automatic test equipment apparatus of the type having a test head interfaced to a handling device, an improvement comprising a kinematic coupling between the test head and the handling device.
Claim 2
Dependent Claim
37 words
The automatic test equipment apparatus of claim 1 wherein the kinematic coupling comprises: a) a plurality of kinematic surfaces mounted to the test head; and b) a plurality of kinematic mating surfaces mounted to the handling device.
Claim 3
Dependent Claim
29 words
The automatic test equipment apparatus of claim 2 wherein the pluality of kinematic surfaces comprises three grooved blocks and the kinematic mating surfaces comprise three posts with spherical portions.
Claim 4
Dependent Claim
14 words
The apparatus of claim 1 wherein the kinematic coupling comprises a preloaded kinematic coupling.
Claim 5
Dependent Claim
41 words
The apparatus of claim 4 wherein the preloaded kinematic coupling comprises: a) a plurality of like bodies, each having a curved portion; b) a post extending from each of the bodies; and c) means for applying a force to each post.
Claim 6
Dependent Claim
58 words
The apparatus of claim 5 additionally comprising a plurality of grooved blocks, each grooved block having a hole formed therethrough, said hole having a diameter larger than the diameter of the post, and each of said grooved blocks being disposed between one of the plurality of bodies having a curved portion and a means for applying a force.
Claim 7
Dependent Claim
26 words
The apparatus of claim 1 additionally comprising: a) a probe card holder; b) a second kinematic coupling between the probe card holder and the test head.
Claim 8
Dependent Claim
86 words
The apparatus of claim 2 wherein a) a plurality of contact points on the kinematic surfaces contact a plurality of points on the kinematic mating surfaces at a plurality of contact points; b) the contact points on the kinematic surfaces define a first plane below the test head; c) the plurality of contact points on the kinematic mating surfaces define a plane above the handling device; and d) said apparatus additionally comprising means for adjusting the orientation of the first plane relative to the second plane.
Claim 9
Dependent Claim
37 words
The kinematic contact of claim 8 wherein the kinematic mating surfaces are mounted to an upper surface of the handling device and wherein the means for adjusting comprises means for adjusting the orientation of the upper surface.
Claim 10
Dependent Claim
39 words
The kinematic contact of claim 9 wherein: a) the kinematic mating surfaces comprise a plurality of posts having semi-spherical portions formed thereon; and b) the means for adjusting comprises a screw coupled to each of the plurality of posts.
References Cited (Backward Citations)
No citation records indexed.
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